Abstract

A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60*60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.

© 2007 Chinese Optics Letters

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  1. H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express. 13, 10066 (2005).
  2. D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).
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  6. O. Sasaki, H. Sasazaki, and T. Suzuki, Appl. Opt. 30, 4040 (1991).
  7. X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).
  8. T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).
  9. X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).
  10. S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).
  11. T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).
  12. X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Appl. Opt. 39, 4593 (2000).
  13. X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).
  14. Y. Liu and X. Wang, Chin. J. Lasers (in Chinese) 33, 1574 (2006).
  15. Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).
  16. X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

2006 (3)

J. Li, O. Sasaki, and T. Suzuki, Opt. Commun. 260, 398 (2006).

Y. Liu and X. Wang, Chin. J. Lasers (in Chinese) 33, 1574 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).

2005 (1)

H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express. 13, 10066 (2005).

2004 (1)

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

2001 (3)

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

2000 (1)

1999 (3)

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).

1994 (1)

T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).

1991 (1)

1989 (1)

1986 (1)

Akiyama, H.

H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express. 13, 10066 (2005).

Bu, Y.

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

Chen, G.

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

Fang, Z.

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

Guo, L.

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

Hirabayashi, S.

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).

Kaneda, J.

T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).

Li, D.

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

Li, J.

J. Li, O. Sasaki, and T. Suzuki, Opt. Commun. 260, 398 (2006).

Liu, Y.

Y. Liu and X. Wang, Chin. J. Lasers (in Chinese) 33, 1574 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

Lu, H.

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

Maruyama, T.

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Appl. Opt. 39, 4593 (2000).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).

T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).

T. Suzuki, O. Sasaki, and T. Maruyama, Appl. Opt. 28, 4407 (1989).

Okazaki, H.

Qian, F.

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

Sasaki, O.

J. Li, O. Sasaki, and T. Suzuki, Opt. Commun. 260, 398 (2006).

H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express. 13, 10066 (2005).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Appl. Opt. 39, 4593 (2000).

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).

T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).

O. Sasaki, H. Sasazaki, and T. Suzuki, Appl. Opt. 30, 4040 (1991).

T. Suzuki, O. Sasaki, and T. Maruyama, Appl. Opt. 28, 4407 (1989).

O. Sasaki and H. Okazaki, Appl. Opt. 25, 3137 (1986).

Sasazaki, H.

Song, S.

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

Suzuki, T.

J. Li, O. Sasaki, and T. Suzuki, Opt. Commun. 260, 398 (2006).

H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express. 13, 10066 (2005).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Appl. Opt. 39, 4593 (2000).

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).

T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).

O. Sasaki, H. Sasazaki, and T. Suzuki, Appl. Opt. 30, 4040 (1991).

T. Suzuki, O. Sasaki, and T. Maruyama, Appl. Opt. 28, 4407 (1989).

Wang, X.

Y. Liu and X. Wang, Chin. J. Lasers (in Chinese) 33, 1574 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).

Y. Liu, X. Wang, and X. Wang, Chin. Opt. Lett. 4, 309 (2006).

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Appl. Opt. 39, 4593 (2000).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).

Yu, D.

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

Acta Opt. Sin. (in Chinese) (1)

X. Wang, X. Wang, D. Yu, F. Qian, and H. Lu, Acta Opt. Sin. (in Chinese) 21, 1368 (2001).

Appl. Opt. (4)

Chin. J. Lasers (in Chinese) (3)

Y. Liu and X. Wang, Chin. J. Lasers (in Chinese) 33, 1574 (2006).

S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chin. J. Lasers (in Chinese) 28, 753 (2001).

D. Li, X. Wang, X. Wang, L. Guo, and Y. Liu, Chin. J. Lasers (in Chinese) 31, 350 (2004).

Chin. Opt. Lett. (1)

Opt. Commun. (1)

J. Li, O. Sasaki, and T. Suzuki, Opt. Commun. 260, 398 (2006).

Opt. Eng. (3)

T. Suzuki, S. Hirabayashi, O. Sasaki, and T. Maruyama, Opt. Eng. 38, 543 (1999).

T. Suzuki, O. Sasaki, J. Kaneda, and T. Maruyama, Opt. Eng. 33, 2754 (1994).

X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Opt. Eng. 38, 1553 (1999).

Opt. Express. (1)

H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express. 13, 10066 (2005).

Opt. Laser Technol. (2)

X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

X. Wang, X. Wang, F. Qian, G. Chen, G. Chen, and Z. Fang, Opt. Laser Technol. 31, 559 (1999).

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