Abstract

The silica microdisk optical resonator which exhibits whispering-gallery-type modes with quality factors of 9.67*10^(4) is fabricated with photolithographic techniques. Reactive ion beam etching (RIBE) is used to get the silica disks with photoresist masks on SiO2/Si made by standard ultraviolet (UV) photolithography, and spontaneous silicon etching by XeF2 is used to fabricate the silicon micropillars. This fabrication process can control the microcavity geometry, leading to high experiment repeatability and controllable cavity modes. These characteristics are important for many applications in which the microcavity is necessary, such as the quantum gate.

© 2007 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |

  1. D. W. Vernooy, A. Furusawa, N. Ph. Georgiades, V. S. Ilchenko, and H. J. Kimble, Phys. Rev. A 57, 2293 (1998).
  2. S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, Nature 415, 621 (2002).
  3. R. E. Slusher, Semicond. Sci. Technol. 9, 2025 (1994).
  4. T. Aoki, B. Dayan, and E. Wilcut, Nature 443, 671 (2006).
  5. M. A. Nielson and I. L. Chuang, Quantum Computation and Quantum Information I: Quantum Computation (in Chinese) (Q. Zhao trans.) (Tsinghua University Press, Beijing, 2004) pp.256-318.
  6. Y.-F. Xiao, Z.-F. Han, and G.-C. Guo, Phys. Rev. A 73, 052324 (2006).
  7. V. S. Ilchenoko, X. S. Yao, and L. Maleki, Opt. Lett. 24, 723 (1999).
  8. T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, Appl. Phys. Lett. 83, 797 (2003).
  9. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 905 (2003).
  10. S. M. Spillane, T. J. Kippenberg, and O. J. Painter, Phys. Rev. Lett. 91, 3902 (2003).
  11. Y. Liu, D. Xu, X. Xu, X. Zhou, Y. Hong, and S. Fu, Journal of University of Science and Technology of China (in Chinese) 37, 536 (2007).
  12. W. Wei, X. Wu, F. Lu, Y. Xiao, S. Fu, Y. Pei, and Z. Han, Journal of University of Science and Technology of China (in Chinese) (to be published).
  13. X. Wu, Y. Xiao, Y. Yang, C. Dong, Z. Han, and G. Guo, Chin. Opt. Lett. 5, 668 (2007).

2007

Y. Liu, D. Xu, X. Xu, X. Zhou, Y. Hong, and S. Fu, Journal of University of Science and Technology of China (in Chinese) 37, 536 (2007).

X. Wu, Y. Xiao, Y. Yang, C. Dong, Z. Han, and G. Guo, Chin. Opt. Lett. 5, 668 (2007).

2006

T. Aoki, B. Dayan, and E. Wilcut, Nature 443, 671 (2006).

Y.-F. Xiao, Z.-F. Han, and G.-C. Guo, Phys. Rev. A 73, 052324 (2006).

2003

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, Appl. Phys. Lett. 83, 797 (2003).

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 905 (2003).

S. M. Spillane, T. J. Kippenberg, and O. J. Painter, Phys. Rev. Lett. 91, 3902 (2003).

2002

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, Nature 415, 621 (2002).

1999

1998

D. W. Vernooy, A. Furusawa, N. Ph. Georgiades, V. S. Ilchenko, and H. J. Kimble, Phys. Rev. A 57, 2293 (1998).

1994

R. E. Slusher, Semicond. Sci. Technol. 9, 2025 (1994).

Appl. Phys. Lett.

T. J. Kippenberg, S. M. Spillane, D. K. Armani, and K. J. Vahala, Appl. Phys. Lett. 83, 797 (2003).

Chin. Opt. Lett.

Journal of University of Science and Technology of China (in Chinese)

Y. Liu, D. Xu, X. Xu, X. Zhou, Y. Hong, and S. Fu, Journal of University of Science and Technology of China (in Chinese) 37, 536 (2007).

Nature

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 905 (2003).

S. M. Spillane, T. J. Kippenberg, and K. J. Vahala, Nature 415, 621 (2002).

T. Aoki, B. Dayan, and E. Wilcut, Nature 443, 671 (2006).

Opt. Lett.

Phys. Rev. A

D. W. Vernooy, A. Furusawa, N. Ph. Georgiades, V. S. Ilchenko, and H. J. Kimble, Phys. Rev. A 57, 2293 (1998).

Y.-F. Xiao, Z.-F. Han, and G.-C. Guo, Phys. Rev. A 73, 052324 (2006).

Phys. Rev. Lett.

S. M. Spillane, T. J. Kippenberg, and O. J. Painter, Phys. Rev. Lett. 91, 3902 (2003).

Semicond. Sci. Technol.

R. E. Slusher, Semicond. Sci. Technol. 9, 2025 (1994).

Other

M. A. Nielson and I. L. Chuang, Quantum Computation and Quantum Information I: Quantum Computation (in Chinese) (Q. Zhao trans.) (Tsinghua University Press, Beijing, 2004) pp.256-318.

W. Wei, X. Wu, F. Lu, Y. Xiao, S. Fu, Y. Pei, and Z. Han, Journal of University of Science and Technology of China (in Chinese) (to be published).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.