Abstract

X-ray supermirror is a non-periodic multilayer structure, whose optical performance is greatly affected by the stability and accuracy of the deposition rate in the fabrication using the direct current (DC) magnetron sputtering. By considering the location-setting time of the substrate positioning above the sputtering target, the deposition rate can be accurately determined. Experimental results show that the optical performance of the supermirror is in agreement with the design aim, which indicates that the layer thickness is well controlled and coincides with the desired ones.

© 2006 Chinese Optics Letters

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  1. K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).
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  8. U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).
  9. S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).
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  14. F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).
  15. W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

2005 (6)

U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

2004 (1)

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

2002 (1)

C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

2001 (1)

M. F. Silva and J. R. Nicholls, Surf. and Coat. Technol. 142-144, 934 (2001).

1998 (3)

1997 (1)

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

1995 (1)

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

1992 (1)

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Bae, B.-S.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Barthelmy, S. D.

Bartlett, L. M.

Bezuidenhout, L. W.

S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).

Chan, K.-W.

Chen, L.

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

Chen, L.-Y.

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Choi, S. H.

U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

Christensen, F. E.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Dew, S. K.

S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).

Ekpe, S. D.

S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).

Fan, X. J.

X. Q. Meng, X. J. Fan, and H. X. Guo, Thin Solid Films 335, 279 (1998).

Fu, S.-J.

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Fursenko, A. A.

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

Furuzawa, A.

Galjukov, A. O.

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

Gehrels, N.

Gorenstein, P.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Guo, H. X.

X. Q. Meng, X. J. Fan, and H. X. Guo, Thin Solid Films 335, 279 (1998).

Haga, K.

Hoghoj, P.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Hong, S.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Hustache, R.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Jiang, Z.-T.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Joensen, K. D.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Kamei, M.

T. Seino, Y. Kawakubo, K. Nalajima, and M. Kamei, Vacuum 51, 791 (1998).

Kawakubo, Y.

T. Seino, Y. Kawakubo, K. Nalajima, and M. Kamei, Vacuum 51, 791 (1998).

Kim, E.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Koh, Y.-B.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Kozhevnikov, I. V.

C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

Kunieda, H.

Kurczynski, P.

Kwon, U. H.

U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

Lee, W. J.

U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

Lim, S.-G.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Lodha, G.

Lutovinov, D. S.

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

Ma, B.

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

Makarov, Y. N.

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

Meng, X. Q.

X. Q. Meng, X. J. Fan, and H. X. Guo, Thin Solid Films 335, 279 (1998).

Morawe, C.

C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

Nakajo, N.

Nakamura, N.

Nalajima, K.

T. Seino, Y. Kawakubo, K. Nalajima, and M. Kamei, Vacuum 51, 791 (1998).

Namba, Y.

Nicholls, J. R.

M. F. Silva and J. R. Nicholls, Surf. and Coat. Technol. 142-144, 934 (2001).

No, K.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Ogasaka, Y.

Okajima, T.

Palmer, D.

Park, Y. H.

U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

Parker, K.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Parsons, A.

Peffen, J. C.

C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

Qin, S.

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

Qin, S.-J.

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Ramm, M. S.

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

Schnopper, H. W.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Seino, T.

T. Seino, Y. Kawakubo, K. Nalajima, and M. Kamei, Vacuum 51, 791 (1998).

Serlemitsos, P. J.

Silva, M. F.

M. F. Silva and J. R. Nicholls, Surf. and Coat. Technol. 142-144, 934 (2001).

Soong, Y.

Stahl, C. M.

Susini, J.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Takata, H.

Tamura, K.

Tawara, Y.

Teegarden, B.

Tueller, J.

Wang, F.

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

Wang, F.-L.

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Wang, H.

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

Wang, H.-C.

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Wang, Z.

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

Wang, Z.-S.

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Woo, S.-G.

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Wood, J.

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Wu, W.

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

Wu, W.-J.

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Xu, X.-D.

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Yamashita, K.

Zhang, S.-M.

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

Zhang, Z.

F. Wang, Z. Wang, S. Qin, W. Wu, Z. Zhang, H. Wang, and L. Chen, Chin. Opt. Lett. 3, 425 (2005).

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Ziegler, E.

C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

Acta Opt. Sin. (in Chinese) (1)

B. Ma, Z. Wang, H. Wang, F. Wang, W. Wu, Z. Zhang, S. Qin, and L. Chen, Acta Opt. Sin. (in Chinese) 25, 1581 (2005).

Appl. Opt. (1)

Chin. Opt. Lett. (1)

J. Crystal Growth (1)

A. A. Fursenko, A. O. Galjukov, Y. N. Makarov, D. S. Lutovinov, and M. S. Ramm, J. Crystal Growth 148, 155 (1995).

Mater. Sci. Eng. B (1)

S. Hong, E. Kim, Z.-T. Jiang, B.-S. Bae, K. No, S.-G. Lim, S.-G. Woo, and Y.-B. Koh, Mater. Sci. Eng. B 45, 98 (1997).

Nucl. Instr. Meth. A (1)

C. Morawe, E. Ziegler, J. C. Peffen, and I. V. Kozhevnikov, Nucl. Instr. Meth. A 493, 198 (2002).

Opt. Precision Eng. (in Chinese) (2)

F.-L. Wang, Z.-S. Wang, Z. Zhang, W.-J. Wu, H.-C. Wang, S.-M. Zhang, S.-J. Qin, and L.-Y. Chen, Opt. Precision Eng. (in Chinese) 13, 28 (2005).

W.-J. Wu, Z.-S. Wang, S.-J. Qin, F.-L. Wang, H.-C. Wang, Z. Zhang, L.-Y. Chen, X.-D. Xu, and S.-J. Fu, Opt. Precision Eng. (in Chinese) 12, 226 (2004).

Optical Technique (in Chinese) (1)

W.-J. Wu, Z.-S. Wang, Z. Zhang, H.-C. Wang, F.-L. Wang, S.-J. Qin, and L.-Y. Chen, Optical Technique (in Chinese) 31, 537 (2005).

Proc. SPIE (1)

K. D. Joensen, F. E. Christensen, H. W. Schnopper, P. Gorenstein, J. Susini, P. Hoghoj, R. Hustache, J. Wood, and K. Parker, Proc. SPIE 1736, 239 (1992).

Surf. and Coat. Technol. (1)

M. F. Silva and J. R. Nicholls, Surf. and Coat. Technol. 142-144, 934 (2001).

Thin Solid Films (3)

U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).

S. D. Ekpe, L. W. Bezuidenhout, and S. K. Dew, Thin Solid Films 474, 330 (2005).

X. Q. Meng, X. J. Fan, and H. X. Guo, Thin Solid Films 335, 279 (1998).

Vacuum (1)

T. Seino, Y. Kawakubo, K. Nalajima, and M. Kamei, Vacuum 51, 791 (1998).

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