Abstract

A novel tri-layer Si-based micro-cantilever thermal infrared (IR) detector with carbon nanotube (CNT) film is fabricated. It is based on the characteristic that the composite micro-cantilever bends in response to incident IR thermal radiation due to the bi-material effect. The bending of micro-cantilever is piezoresistively detected. Furthermore, a new IR absorbing layer material --- CNTs --- is coated in order to enhance IR radiation absorbing characteristic. the micro-electro-mechanical system (MEMS) sensor could be compatible with integrated circuit technology.

© 2005 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).
  2. J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).
  3. A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).
  4. A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).
  5. J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).
  6. W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).
  7. H. Li, B. Huang, D. Yi, H. Cui, Y. He, and J. Peng, Chin. Opt. Lett. 2, 171 (2004).
  8. X. Chen, Z. Jing, S. Sun, and G. Xiao, Chin. Opt. Lett. 2, 694 (2004).
  9. H. Hu, Z. Jing, and S. Hu, Chin. Opt. Lett. 3, 322 (2004).
  10. O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).
  11. W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).
  12. Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

2004 (4)

2003 (2)

A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

2002 (1)

A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).

2001 (1)

J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).

2000 (1)

J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).

1999 (1)

W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).

1995 (1)

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

1992 (1)

W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).

Chandrachood, M.

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

Chen, X.

Corbeil, J. L.

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

Cui, H.

Datskos, P. G.

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

Esashi, M.

J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).

Fang, W.

W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).

Han, C.-H.

J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).

He, Y.

Hu, H.

Hu, S.

Huang, B.

Jing, Z.

Kim, J.-K.

J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).

Kiyoshi, Y.

Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Kuhl, K.

W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).

Lai, J.

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

Lang, W.

W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).

Lavrik, N. V.

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

Li, H.

Liu, Y.-F.

Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Lo, C.-Y.

W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).

Ma, B.-H.

Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Majumdar, A.

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

Nakabeppu, O.

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

Ono, T.

J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).

Peng, J.

Rajic, S.

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

Rogalski, A.

A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).

Sandmaier, H.

W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).

Senesac, L. R.

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

Shen, Z.-M.

Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Sun, S.

Then, D.

A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).

Tsai, H.-C.

W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).

Vidic, A.

A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).

Wu, Y.

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

Xiao, G.

Yang, J.

J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).

Yi, D.

Yu, J.-M.

Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Ziegler, Ch.

A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).

Appl. Phys. Lett. (1)

O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).

Chin. Opt. Lett. (3)

Infrared Phys. Technol. (1)

A. Rogalski, Infrared Phys. Technol. 43, 187 (2002).

New Carbon Materials (in Chinese) (1)

Y.-F. Liu, Z.-M. Shen, Y. Kiyoshi, B.-H. Ma, and J.-M. Yu, New Carbon Materials (in Chinese) 19, 197 (2004).

Sensors and Actuators A (4)

W. Lang, K. Kuhl, and H. Sandmaier, Sensors and Actuators A 34, 243 (1992).

J. Yang, T. Ono, and M. Esashi, Sensors and Actuators A 82, 102 (2000).

W. Fang, H.-C. Tsai, and C.-Y. Lo, Sensors and Actuators A 77, 21 (1999).

J.-K. Kim and C.-H. Han, Sensors and Actuators A 89, 22 (2001).

Ultramicroscopy (2)

A. Vidic, D. Then, and Ch. Ziegler, Ultramicroscopy 97, 407 (2003).

L. R. Senesac, J. L. Corbeil, S. Rajic, N. V. Lavrik, and P. G. Datskos, Ultramicroscopy 97, 451 (2003).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.