Abstract

A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100*100 (micron) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.

© 2006 Chinese Optics Letters

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  1. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
  2. D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).
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  4. P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).
  5. D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).
  6. G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).
  7. M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).
  8. C. B. Prater, J. Massie, D. A. Grigg, V. B. Elings, P. K. Hansma, and B. Drake, Scanning stylus atomic force microscope with cantilever tracking and optical access US Patent 5560244 (1996).

1994

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

1993

D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).

1992

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

1990

G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).

1986

G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

Amer, N. M.

G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).

Baldeschwieler, J. D.

D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).

Baselt, D. R.

D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).

Bielefeldt, H.

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

Binnig, G.

G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

Bocek, D.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Chen, T.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Colchero, J.

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

Drake, B.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Elings, V.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Feinstein, S.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Gallagher, M.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Gerber, Ch.

G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

Greve, J.

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Grigg, D.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Grooth, B. G. de

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Gurley, G.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Hansma, P. K.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Hipp, M.

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

Howells, S.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Hulst, N. F. van

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Lal, R.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Marti, O.

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

Meyer, G.

G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).

Mlynek, J.

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

Oort, G. van

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Pax, P.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Prater, C. B.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Putman, C. A.

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Quate, C. F.

G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

Sarid, D.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Werf, K. O. van der

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Yashar, F.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Yi, L.

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Appl. Phys. Lett.

G. Meyer and N. M. Amer, Appl. Phys. Lett. 56, 2100 (1990).

J. Appl. Phys.

P. K. Hansma, B. Drake, D. Grigg, C. B. Prater, F. Yashar, G. Gurley, V. Elings, S. Feinstein, and R. Lal, J. Appl. Phys. 76, 796 (1994).

Phys. Rev. Lett.

G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).

Proc. SPIE

B. G. de Grooth, C. A. Putman, K. O. van der Werf, N. F. van Hulst, G. van Oort, and J. Greve, Proc. SPIE 1639, 205 (1992).

Rev. Sci. Instrum.

D. R. Baselt and J. D. Baldeschwieler, Rev. Sci. Instrum. 64, 908 (1993).

D. Sarid, P. Pax, L. Yi, S. Howells, M. Gallagher, T. Chen, V. Elings, and D. Bocek, Rev. Sci. Instrum. 63, 3905 (1992).

Ultramicroscopy

M. Hipp, H. Bielefeldt, J. Colchero, O. Marti, and J. Mlynek, Ultramicroscopy 42-44, 1498 (1992).

Other

C. B. Prater, J. Massie, D. A. Grigg, V. B. Elings, P. K. Hansma, and B. Drake, Scanning stylus atomic force microscope with cantilever tracking and optical access US Patent 5560244 (1996).

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