Abstract

A new dual-frequency laser displacement measurement interferometer with nanometer precision has been developed. An eight-pass optical subdivision technology is proposed to improve resolution based on commercial interferometers. A static positioning error measuring method has been used to examine the precision and repeatability of the laser interferometer. An optical resolution of 1.24 nm and an accuracy of nanometer scale have been achieved.

© 2005 Chinese Optics Letters

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References

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2004 (3)

J. Lawall, Opt. Photon. News 15, 40 (2004).

Z.-F. Zhou, T. Zhang, W. Huang, L.-D. Guo, and J. Huang, Appl. Opt. 43, 4816 (2004).

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

2003 (1)

2002 (1)

1999 (1)

Y. Zhao, T. Zhou, and D. Li, Opt. Eng. 38, 246 (1999).

1985 (1)

Chai, X.

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

Chen, B. Y.

Cheng, X. H.

Cheng, Z.

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

Estler, W. T.

Gao, H.

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

Guo, L.-D.

Huang, H.

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

Huang, J.

Huang, W.

Lawall, J.

J. Lawall, Opt. Photon. News 15, 40 (2004).

Lee, D.-I.

Li, D.

Y. Zhao, T. Zhou, and D. Li, Opt. Eng. 38, 246 (1999).

Li, D. C.

Ning, Z.

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

Roychoudhuri, C.

Zhang, T.

Zhao, Y.

Y. Zhao, T. Zhou, and D. Li, Opt. Eng. 38, 246 (1999).

Zhou, T.

Y. Zhao, T. Zhou, and D. Li, Opt. Eng. 38, 246 (1999).

Zhou, Z.-F.

Appl. Opt. (3)

Opt. Eng. (1)

Y. Zhao, T. Zhou, and D. Li, Opt. Eng. 38, 246 (1999).

Opt. Express (1)

Opt. Photon. News (1)

J. Lawall, Opt. Photon. News 15, 40 (2004).

Proc. SPIE (1)

Z. Cheng, H. Gao, X. Chai, Z. Ning, and H. Huang, Proc. SPIE 5662, 395 (2004).

Other (2)

X. Guan, S. Yuan, and Y. Liu, Dual-Frequency Laser Interferometer (in Chinese) (China Metrology Press, Beijing, 1987) p.27.

Agilent 5529A Dynamic Calibrator Data Sheet.

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