Talbot effect of a grating with different flaws is analyzed with the finite-difference time-domain (FDTD) method. The FDTD method can show the exact near-field distribution of different flaws in a high-density grating, which is impossible to obtain with the conventional Fourier transform method. The numerical results indicate that if a grating is perfect, its Talbot imaging should also be perfect; if the grating is distorted, its Talbot imaging would also be distorted. Furthermore, we can evaluate high density gratings by detecting the near-field distribution.
© 2005 Chinese Optics LettersPDF Article