Abstract

Polysilicon films deposited by low-pressure chemical vapor deposition (LPCVD) exhibit large residual stress and stress gradient, depending on the deposition condition. An in situ growth method based on multi-layer concept is presented to control the property for as-deposited polysilicon. A 3-?m-thick polysilicon film with nine layers structure is demonstrated under the detailed analysis of multi-layer theory and material characteristic of polysilicon. The results show that a 3-?m-thick polysilicon film with 8-MPa overall residual tensile stress and 2.125-MPa/?m stress gradient through the film thickness is fabricated successfully.

© 2005 Chinese Optics Letters

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  2. B. P. Temple, E. Scheid, and G. Faugere, Thin Solid Films 310, 234 (1997).
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  9. P. B. Mirkarimi and C. Montcalm, Proc. SPIE 3331, 133 (1998).
  10. Y. H. Min and Y. K. Kim, Sensors and Actuators 78, 8 (1999).
  11. H. L. Weng, Mechanics of Materials (Higher Education Press, Beijng, 1993).
  12. M. J. Madou, Fundamentals of Microfabrication: the Science of Miniaturization (2nd edition) (CRC Press, Boca Raton, 2002).

2002

G. B. Thomas, T. Harley, P. Bierden, and R. K. Mali, J. Micromech System 11, 592 (2002).

2001

K. Cao, W. Liu, and J. J. Talghader, J. Micromech System 10, 409 (2001).

1999

Y. H. Min and Y. K. Kim, Sensors and Actuators 78, 8 (1999).

1998

J. M. Freitag and B. M. Clemens, Appl. Phys. Lett. 73, 43 (1998).

P. B. Mirkarimi and C. Montcalm, Proc. SPIE 3331, 133 (1998).

1997

B. P. Temple, E. Scheid, and G. Faugere, Thin Solid Films 310, 234 (1997).

1995

A. Ponchet and A. Rocher, J. Appl. Phys. 77, 1977 (1995).

1984

M. S. Choi and E. W. Hearn, J. Electrochem. Soc. 35, 800 (1984).

Bierden, P.

G. B. Thomas, T. Harley, P. Bierden, and R. K. Mali, J. Micromech System 11, 592 (2002).

Cao, K.

K. Cao, W. Liu, and J. J. Talghader, J. Micromech System 10, 409 (2001).

Choi, M. S.

M. S. Choi and E. W. Hearn, J. Electrochem. Soc. 35, 800 (1984).

Clemens, B. M.

J. M. Freitag and B. M. Clemens, Appl. Phys. Lett. 73, 43 (1998).

Faugere, G.

B. P. Temple, E. Scheid, and G. Faugere, Thin Solid Films 310, 234 (1997).

Freitag, J. M.

J. M. Freitag and B. M. Clemens, Appl. Phys. Lett. 73, 43 (1998).

Harley, T.

G. B. Thomas, T. Harley, P. Bierden, and R. K. Mali, J. Micromech System 11, 592 (2002).

Hearn, E. W.

M. S. Choi and E. W. Hearn, J. Electrochem. Soc. 35, 800 (1984).

Kim, Y. K.

Y. H. Min and Y. K. Kim, Sensors and Actuators 78, 8 (1999).

Liu, W.

K. Cao, W. Liu, and J. J. Talghader, J. Micromech System 10, 409 (2001).

Mali, R. K.

G. B. Thomas, T. Harley, P. Bierden, and R. K. Mali, J. Micromech System 11, 592 (2002).

Min, Y. H.

Y. H. Min and Y. K. Kim, Sensors and Actuators 78, 8 (1999).

Mirkarimi, P. B.

P. B. Mirkarimi and C. Montcalm, Proc. SPIE 3331, 133 (1998).

Montcalm, C.

P. B. Mirkarimi and C. Montcalm, Proc. SPIE 3331, 133 (1998).

Ponchet, A.

A. Ponchet and A. Rocher, J. Appl. Phys. 77, 1977 (1995).

Rocher, A.

A. Ponchet and A. Rocher, J. Appl. Phys. 77, 1977 (1995).

Scheid, E.

B. P. Temple, E. Scheid, and G. Faugere, Thin Solid Films 310, 234 (1997).

Talghader, J. J.

K. Cao, W. Liu, and J. J. Talghader, J. Micromech System 10, 409 (2001).

Temple, B. P.

B. P. Temple, E. Scheid, and G. Faugere, Thin Solid Films 310, 234 (1997).

Thomas, G. B.

G. B. Thomas, T. Harley, P. Bierden, and R. K. Mali, J. Micromech System 11, 592 (2002).

Appl. Phys. Lett.

J. M. Freitag and B. M. Clemens, Appl. Phys. Lett. 73, 43 (1998).

J. Appl. Phys.

A. Ponchet and A. Rocher, J. Appl. Phys. 77, 1977 (1995).

J. Electrochem. Soc.

M. S. Choi and E. W. Hearn, J. Electrochem. Soc. 35, 800 (1984).

J. Micromech System

G. B. Thomas, T. Harley, P. Bierden, and R. K. Mali, J. Micromech System 11, 592 (2002).

K. Cao, W. Liu, and J. J. Talghader, J. Micromech System 10, 409 (2001).

Proc. SPIE

P. B. Mirkarimi and C. Montcalm, Proc. SPIE 3331, 133 (1998).

Sensors and Actuators

Y. H. Min and Y. K. Kim, Sensors and Actuators 78, 8 (1999).

Thin Solid Films

B. P. Temple, E. Scheid, and G. Faugere, Thin Solid Films 310, 234 (1997).

Other

D. Oei and S. L. McCarthy, in Proceedings of MRS Symposium 1992 85 (1992).

M. M. Farooqui and A. Evans, in Proceedings of IEEE Micro Electro Mechanical Systems Workshop MEMS91 187 (1991).

H. L. Weng, Mechanics of Materials (Higher Education Press, Beijng, 1993).

M. J. Madou, Fundamentals of Microfabrication: the Science of Miniaturization (2nd edition) (CRC Press, Boca Raton, 2002).

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