Abstract

In this paper, the fabrication and testing results of a two-dimensional pin-cushion position sensitive detector (PSD) are presented. The obtained pin-cushion PSD with an 8 * 8 mm2 effective area presents a maximum spectral response of 0.5 mA/mW at 850-nm wavelength, a 12-nA dark current at 5-V reverse voltage, a reverse breakdown voltage of 50 V, a nonlinearity of 2.175%, and a spatial resolution of 10 um. The spatial resolution is relatively low and the slight pin-cushion concave distortion is generated due to the incompletely satisfied relationship between sheet resistivity of the anode and the resistance per unit length.

© 2005 Chinese Optics Letters

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  2. H. J. Woltring, IEEE Trans. Electron. Dev. 22, 581 (1975).
  3. W. Wang and I. J. Busch-Vishniac, IEEE Trans. Electron. Dev. 36, 2475 (1989).
  4. M. Z. Huang, Study on position sensitive detector (in Chinese) Doctoral Dissertation (Zhejiang University, Hangzhou, 2001) p. 81.
  5. R. L. Cowin and D. L. Watson, Nucl. Instr. Meth. in Phys. Res. A 399, 365 (1997).
  6. E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

1997

R. L. Cowin and D. L. Watson, Nucl. Instr. Meth. in Phys. Res. A 399, 365 (1997).

1996

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

1989

W. Wang and I. J. Busch-Vishniac, IEEE Trans. Electron. Dev. 36, 2475 (1989).

1975

H. J. Woltring, IEEE Trans. Electron. Dev. 22, 581 (1975).

1960

G. Lucovsky, J. Appl. Phys. 31, 1088 (1960).

Busch-Vishniac, I. J.

W. Wang and I. J. Busch-Vishniac, IEEE Trans. Electron. Dev. 36, 2475 (1989).

Cowin, R. L.

R. L. Cowin and D. L. Watson, Nucl. Instr. Meth. in Phys. Res. A 399, 365 (1997).

Fernandez, L.

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

Forunato, E.

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

Lavareda, G.

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

Lucovsky, G.

G. Lucovsky, J. Appl. Phys. 31, 1088 (1960).

Martins, R.

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

Soares, F.

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

Wang, W.

W. Wang and I. J. Busch-Vishniac, IEEE Trans. Electron. Dev. 36, 2475 (1989).

Watson, D. L.

R. L. Cowin and D. L. Watson, Nucl. Instr. Meth. in Phys. Res. A 399, 365 (1997).

Woltring, H. J.

H. J. Woltring, IEEE Trans. Electron. Dev. 22, 581 (1975).

IEEE Trans. Electron. Dev.

H. J. Woltring, IEEE Trans. Electron. Dev. 22, 581 (1975).

W. Wang and I. J. Busch-Vishniac, IEEE Trans. Electron. Dev. 36, 2475 (1989).

J. Appl. Phys.

G. Lucovsky, J. Appl. Phys. 31, 1088 (1960).

Nucl. Instr. Meth. in Phys. Res. A

R. L. Cowin and D. L. Watson, Nucl. Instr. Meth. in Phys. Res. A 399, 365 (1997).

Sensors and Actuators A

E. Forunato, G. Lavareda, R. Martins, F. Soares, and L. Fernandez, Sensors and Actuators A 51, 135 (1996).

Other

M. Z. Huang, Study on position sensitive detector (in Chinese) Doctoral Dissertation (Zhejiang University, Hangzhou, 2001) p. 81.

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