Abstract

In this paper, the fabrication and testing results of a two-dimensional pin-cushion position sensitive detector (PSD) are presented. The obtained pin-cushion PSD with an 8 * 8 mm2 effective area presents a maximum spectral response of 0.5 mA/mW at 850-nm wavelength, a 12-nA dark current at 5-V reverse voltage, a reverse breakdown voltage of 50 V, a nonlinearity of 2.175%, and a spatial resolution of 10 um. The spatial resolution is relatively low and the slight pin-cushion concave distortion is generated due to the incompletely satisfied relationship between sheet resistivity of the anode and the resistance per unit length.

© 2005 Chinese Optics Letters

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