Abstract

Spectroscopicellipsometric measurements in infrared region (2.5-12.5 um) are carried out to characterize the structure and quality of diamond films grown by microwave plasma chemical vapor deposition (MPCVD) and hot filament chemical vapor deposition (HFCVD), respectively. It is found that the establishment of appropriate models has the strongest influence on the fit of ellipsometric spectra. The best fit is achieved for MPCVD film with a 77.5-nm middle layer of SiO2, and for HFCVD film with an 879-nm rough surface layer included by Bruggeman effective medium approtimation (EMA). Finally the refractive index and the extinction coefficient are calculated for both films, the results show that the film grown by MPCVD is optically much better than that grown by HFCVD at infrared wavelengths.

© 2005 Chinese Optics Letters

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  1. F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).
  2. Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).
  3. K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).
  4. L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).
  5. P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).
  6. J. C. Comfort, Annual Simulation Symposium (Society for Computer Simulation, New York, 1987) p. 185.
  7. Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).
  8. Z. J. Fang, Y. B. Xia, L. J. Wang, Z. W. Wang, W. L. Zhang, and Y. M. Fan, J. Phys. D: Appl. Phys. 35, L57 (2002).
  9. D. A. G. Bruggeman, Ann. Phys. 5, 636 (1935).

2003 (1)

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

2000 (1)

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

1997 (1)

Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

1996 (1)

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

1994 (1)

K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).

1986 (1)

P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).

1935 (1)

D. A. G. Bruggeman, Ann. Phys. 5, 636 (1935).

Akkerman, Z.

Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

Bruggeman, D. A. G.

D. A. G. Bruggeman, Ann. Phys. 5, 636 (1935).

Chauveau, Th.

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

Cledat, P.

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

Fan, Y. M.

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Fang, Z. J.

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

Gicquel, A.

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

Gleason, K. K.

K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).

Ju, J. H.

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Ma, Z. G.

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

McMarr, P. J.

P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).

McNamara, K. M.

K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).

Narayan, J.

P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).

Scruggs, B. E.

K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).

Shi, W. M.

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Silva, F.

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

Smith, F. W.

Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

Tardieu, A.

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

Vedam, K.

P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).

Wang, L. J.

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Wu, Y. W.

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Xia, Y. B.

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Yang, B. X.

Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

Yin, Z.

Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

Zhang, M. L.

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

Zhang, W. L.

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

Acta Opti. Sin. (in Chinese) (1)

Z. G. Ma, Y. B. Xia, L. J. Wang, Z. J. Fang, W. L. Zhang, and M. L. Zhang, Acta Opti. Sin. (in Chinese) 23, 989 (2003).

Ann. Phys. (1)

D. A. G. Bruggeman, Ann. Phys. 5, 636 (1935).

Appl. Phys. Lett. (1)

P. J. McMarr, K. Vedam, and J. Narayan, Appl. Phys. Lett. 59, 694 (1986).

Diamond & Related Materials (2)

F. Silva, A. Gicquel, A. Tardieu, P. Cledat, and Th. Chauveau, Diamond & Related Materials 5, 338 (1996).

Z. Yin, Z. Akkerman, F. W. Smith, and B. X. Yang, Diamond & Related Materials 6, 153 (1997).

J. Phys.: Condensed Matter (1)

L. J. Wang, Y. B. Xia, J. H. Ju, Y. M. Fan, Y. W. Wu, and W. M. Shi, J. Phys.: Condensed Matter 12, 257 (2000).

Thin Solid Films (1)

K. M. McNamara, B. E. Scruggs, and K. K. Gleason, Thin Solid Films 253, 157 (1994).

Other (2)

J. C. Comfort, Annual Simulation Symposium (Society for Computer Simulation, New York, 1987) p. 185.

Z. J. Fang, Y. B. Xia, L. J. Wang, Z. W. Wang, W. L. Zhang, and Y. M. Fan, J. Phys. D: Appl. Phys. 35, L57 (2002).

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