Abstract

Based on the evaluation principle of the measuring uncertainty of the traditional coordinate measuring machine (CMM), the analysis and evaluation of the measuring uncertainty for optical micro-CMM have been made. Optical micro-CMM is an integrated measuring system with optical, mechanical, and electronic components, which may influence the measuring uncertainty of the optical micro-CMM. If the influence of laser speckle is taken into account, its longitudinal measuring uncertainty is 2.0 ?m, otherwise it is 0.88 ?m. It is proved that the estimation of the synthetic uncertainty for optical micro-CMM is correct and reliable by measuring the standard reference materials and simulating the influence of the diameter of laser beam. With Heisenberg's uncertainty principle and quantum mechanics theory, a method for improving the measuring accuracy of optical micro-CMM through adding a diaphragm in the receiving terminal of the light path was proposed, and the measuring results are verified by experiments.

© 2005 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).
  2. X. X. Fang and Z. G. Wang, Chin. J. Scientific Instrument (in Chinese) 23, 171 (2002).
  3. S. W. Lin and Z. T. Wu, Chin. Mechanical Eng. (in Chinese) 12, 1114 (2001).
  4. Y. T. Fei, X. H. Chen, and L. Qin, Error Theory and Data Processing (4th edition) (in Chinese) (China Machine Press, Beijing, 2001) p. 82, p. 93.
  5. S. W. Wang and B. H. Zhang, Journal of Shandong Institute of Building Materials (in Chinese) 10, 63 (1996).
  6. R. G. Dorsch, G. Hausler, and J. M. Herrmann, Appl. Opt. 33, 1306 (1994).
  7. J. H. Hao, J. L. Zhao, H. Y. Tan, and E. P. Li, Opt. Technol. (in Chinese) (2) 37 (1998).
  8. O. Falconi, J. Opt. Soc. Am. 54, 1315 (1964).
  9. W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).
  10. R. Baribeau and M. Rioux, Appl. Opt. 30, 2873 (1991).

2002

X. X. Fang and Z. G. Wang, Chin. J. Scientific Instrument (in Chinese) 23, 171 (2002).

2001

S. W. Lin and Z. T. Wu, Chin. Mechanical Eng. (in Chinese) 12, 1114 (2001).

1999

D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).

1996

W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).

S. W. Wang and B. H. Zhang, Journal of Shandong Institute of Building Materials (in Chinese) 10, 63 (1996).

1994

1991

1964

Baribeau, R.

Dorsch, R. G.

Falconi, O.

Fang, X. X.

X. X. Fang and Z. G. Wang, Chin. J. Scientific Instrument (in Chinese) 23, 171 (2002).

Hausler, G.

Herrmann, J. M.

Li, J. T.

W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).

Li, S. H.

D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).

Li, W. S.

W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).

Lin, S. W.

S. W. Lin and Z. T. Wu, Chin. Mechanical Eng. (in Chinese) 12, 1114 (2001).

Rioux, M.

Su, X. Y.

W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).

Wang, D. S.

D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).

Wang, S. W.

S. W. Wang and B. H. Zhang, Journal of Shandong Institute of Building Materials (in Chinese) 10, 63 (1996).

Wang, Z. G.

X. X. Fang and Z. G. Wang, Chin. J. Scientific Instrument (in Chinese) 23, 171 (2002).

Wu, Z. T.

S. W. Lin and Z. T. Wu, Chin. Mechanical Eng. (in Chinese) 12, 1114 (2001).

Zhang, B. H.

S. W. Wang and B. H. Zhang, Journal of Shandong Institute of Building Materials (in Chinese) 10, 63 (1996).

Zhang, G. X.

D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).

Appl. Opt.

Chin. J. Lasers (in Chinese)

W. S. Li, X. Y. Su, and J. T. Li, Chin. J. Lasers (in Chinese) 23, 1081 (1996).

Chin. J. Scientific Instrument (in Chinese)

X. X. Fang and Z. G. Wang, Chin. J. Scientific Instrument (in Chinese) 23, 171 (2002).

Chin. Mechanical Eng. (in Chinese)

S. W. Lin and Z. T. Wu, Chin. Mechanical Eng. (in Chinese) 12, 1114 (2001).

J. Opt. Soc. Am.

Journal of Shandong Institute of Building Materials (in Chinese)

S. W. Wang and B. H. Zhang, Journal of Shandong Institute of Building Materials (in Chinese) 10, 63 (1996).

Journal of Tianjin University (in Chinese)

D. S. Wang, S. H. Li, and G. X. Zhang, Journal of Tianjin University (in Chinese) 32, 514 (1999).

Other

Y. T. Fei, X. H. Chen, and L. Qin, Error Theory and Data Processing (4th edition) (in Chinese) (China Machine Press, Beijing, 2001) p. 82, p. 93.

J. H. Hao, J. L. Zhao, H. Y. Tan, and E. P. Li, Opt. Technol. (in Chinese) (2) 37 (1998).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.