Abstract

In wavelength division multiplexing (WDM) systems, an arrayed waveguide grating (AWG) multiplexer is a key component. A polymeric AWG multiplexer has recently attracted much attention due to its low cost processing and a potential of integration with other devices. Fluorinated poly (ether ether ketone) (FPEEK) is excellent material for fabrication of optical waveguides due to its low absorption loss at 1.55-?m wavelength and high thermal stability. A 32-channel AWG multiplexer has been designed based on the grating diffraction theory and fabricated using newly synthesized FPEEK. During the fabrication process of the Polymer/Si AWG device, spin coating, vaporizing, photolithographic patterning and reactive ion etching (RIE) are used. The AWG multiplexer measurement system is based on a tunable semiconductor laser, infrared camera and a Peltier-type heater. The device exhibits a wavelength channel spacing of 0.8 nm and a center wavelength of 1548 nm in the room temperature.

© 2005 Chinese Optics Letters

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  1. G. E. Keiser, Optical Fiber Technol. 5, 3 (1999).
  2. B. Nyman, M. Farries, and C. Si, Optical Fiber Technol. 7, 255 (2001).
  3. Y. L. Chu and H. Y. Zhang, Chin. Opt. Lett. 1, 196 (2003).
  4. B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).
  5. M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).
  6. S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).
  7. Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).
  8. J. Kobayashi, T. Matsuura, S. Sasaki, and T. Maruno, Appl. Opt. 37, 1032 (1998).
  9. J. W. Kang, J. P. Kim, W. Y. Lee, J. S. Kim, J. S. Lee, and J. J. Kim, J. Lightwave Technol. 19, 872 (2001).
  10. Y. X. Wu, P. Lu, and D. M. Liu, Chin. J. Lasers (in Chinese) 30, 521 (2003).
  11. Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).
  12. W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).
  13. B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

2003 (2)

Y. X. Wu, P. Lu, and D. M. Liu, Chin. J. Lasers (in Chinese) 30, 521 (2003).

Y. L. Chu and H. Y. Zhang, Chin. Opt. Lett. 1, 196 (2003).

2002 (5)

Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

2001 (3)

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

J. W. Kang, J. P. Kim, W. Y. Lee, J. S. Kim, J. S. Lee, and J. J. Kim, J. Lightwave Technol. 19, 872 (2001).

B. Nyman, M. Farries, and C. Si, Optical Fiber Technol. 7, 255 (2001).

1999 (1)

G. E. Keiser, Optical Fiber Technol. 5, 3 (1999).

1998 (1)

1993 (1)

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

Chen, C. H.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Chen, K. X.

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Chu, Y. L.

Cui, Z. C.

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Dragone, C.

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

Farries, M.

B. Nyman, M. Farries, and C. Si, Optical Fiber Technol. 7, 255 (2001).

Gaiffe, Th.

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

Guo, F. Y.

Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).

Guo, W. B.

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Hu, W.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Jiang, X. Q.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Jiang, Z. H.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Joyner, C. H.

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

Kang, J. W.

Keiser, G. E.

G. E. Keiser, Optical Fiber Technol. 5, 3 (1999).

Kim, J. J.

Kim, J. P.

Kim, J. S.

Kitoh, T.

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

Kobayashi, J.

Kurihara, T.

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

Lee, J. S.

Lee, W. Y.

Li, B. Y.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Li, T.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Li, X. M.

Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).

Liu, B. J.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Liu, D. M.

Y. X. Wu, P. Lu, and D. M. Liu, Chin. J. Lasers (in Chinese) 30, 521 (2003).

Liu, S. Y.

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Lu, P.

Y. X. Wu, P. Lu, and D. M. Liu, Chin. J. Lasers (in Chinese) 30, 521 (2003).

Lv, T. S.

Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).

Ma, C. S.

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

Maruno, T.

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

J. Kobayashi, T. Matsuura, S. Sasaki, and T. Maruno, Appl. Opt. 37, 1032 (1998).

Matsuura, T.

Nyman, B.

B. Nyman, M. Farries, and C. Si, Optical Fiber Technol. 7, 255 (2001).

Ooba, N.

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

Qiu, Y. S.

Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).

Sasaki, S.

Si, C.

B. Nyman, M. Farries, and C. Si, Optical Fiber Technol. 7, 255 (2001).

Stulz, L. W.

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

Su, H.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Tang, Y. Z.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Toyoda, S.

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

Wang, F.

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

Wang, M. H.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Wang, Y. L.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Wu, Y. M.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Wu, Y. X.

Y. X. Wu, P. Lu, and D. M. Liu, Chin. J. Lasers (in Chinese) 30, 521 (2003).

Wu, Z. W.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Yang, J. Y.

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Yi, M. B.

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

Zhang, D. M.

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Zhang, H. Y.

Zhang, W. J.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Zhao, S.

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Zhao, Y.

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

Zirngibl, M.

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

Acta Opt. Sin. (in Chinese) (1)

B. Y. Li, X. Q. Jiang, Y. Z. Tang, J. Y. Yang, M. H. Wang, T. Li, Y. M. Wu, and Y. L. Wang, Acta Opt. Sin. (in Chinese) 22, 1100 (2002).

Appl. Opt. (1)

Chem. J. Chinese Universities (in Chinese) (1)

B. J. Liu, C. H. Chen, W. Hu, H. Su, S. Zhao, Z. H. Jiang, W. J. Zhang, and Z. W. Wu, Chem. J. Chinese Universities (in Chinese) 23, 321 (2002).

Chin. J. Lasers (in Chinese) (1)

Y. S. Qiu, X. M. Li, T. S. Lv, and F. Y. Guo, Chin. J. Lasers (in Chinese) 29, 801 (2002).

Chin. J. Lasers (in Chinese) (1)

Y. X. Wu, P. Lu, and D. M. Liu, Chin. J. Lasers (in Chinese) 30, 521 (2003).

Chin. Opt. Lett. (1)

Electron. Lett. (2)

M. Zirngibl, C. H. Joyner, L. W. Stulz, Th. Gaiffe, and C. Dragone, Electron. Lett. 29, 201 (1993).

S. Toyoda, N. Ooba, T. Kitoh, T. Kurihara, and T. Maruno, Electron. Lett. 37, 1130 (2001).

J. Lightwave Technol. (1)

J. Optoelectronics.Laser (1)

Y. Zhao, C. S. Ma, D. M. Zhang, F. Wang, Z. C. Cui, S. Y. Liu, and M. B. Yi, J. Optoelectronics.Laser 13, 1097 (2002).

Opt. Commun. (1)

W. B. Guo, C. S. Ma, D. M. Zhang, K. X. Chen, Y. Zhao, Z. C. Cui, and S. Y. Liu, Opt. Commun. 201, 45 (2002).

Optical Fiber Technol. (2)

G. E. Keiser, Optical Fiber Technol. 5, 3 (1999).

B. Nyman, M. Farries, and C. Si, Optical Fiber Technol. 7, 255 (2001).

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