Abstract

We demonstrate high-quality (intrinsic Q factor ∼2.8 × 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from −100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.

© 2021 Chinese Laser Press

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