Abstract

The laser-induced damage threshold of a calcium fluoride (CaF₂) single crystal was obtained by a 193 nm ArF excimer laser. The damage morphology of the crystal was analyzed. The results showed that the surface of CaF₂ single crystal broke along the natural cleavage plane under ArF excimer laser irradiation, some fragments fell off, and Newton’s rings were observed on the curved fragments. Laser-induced periodic stripe structures (LIPSS) appeared on the surface layer beneath the fragments that peeled off. The spacing of LIPSS was measured, and the formation mechanism of LIPSS was analyzed based on the interference model.

© 2020 Chinese Laser Press

Time-resolved photoluminescence for diagnosis of resistance to ArF excimer laser damage to CaF₂ single crystals

Masafumi Mizuguchi, Hideo Hosono, Hiroshi Kawazoe, and Tohru Ogawa
J. Opt. Soc. Am. B 16(7) 1153-1159 (1999)

Influence of sodium impurities on ArF excimer-laser-induced absorption in CaF₂ crystals

Norio Komine, Shigeru Sakuma, Masaki Shiozawa, Tsutomu Mizugaki, and Eiji Sato
Appl. Opt. 39(22) 3925-3930 (2000)

Evolution of local surface roughness in 193 nm ArF excimer laser ablation of ground Yb:YAG crystal

Jingzhen Shao, Xu Liang, Ying Lin, Qihui Shen, Jiacheng Ren, and Qingli Zhang
J. Opt. Soc. Am. B 40(8) 2183-2190 (2023)

Laser-induced damage on single-crystal metal surfaces

Yong Jee, Michael F. Becker, and Rodger M. Walser
J. Opt. Soc. Am. B 5(3) 648-659 (1988)

Time-resolved imaging of CaF₂ poly-crystal response following 355 nm nanosecond laser irradiation

Jiuling Meng, Yong Jiang, Rong Qiu, and Tao Lü
J. Opt. Soc. Am. B 38(12) 3622-3631 (2021)