Abstract

In order to fabricate a large-aperture continuous phase plate (CPP) using atmospheric pressure plasma processing (APPP) with high efficiency and precision, the position dwell mode and velocity mode were proposed and the iterative calculation method was developed for the non-constant removal rate. Two 320 mm × 320 mm × 2 mm CPPs were fabricated with two processing modes. The experiment results show that the velocity mode is capable of significantly reducing the processing time and shape error. The total processing time is decreased from 13.2 h to 9.3 h, and the surface shape error is decreased from 0.158λ to 0.119λ (λ = 632.8 nm) (root mean square).

© 2018 Chinese Laser Press

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription