Abstract
The Pd/B4C multilayer is a promising candidate for high reflectance
mirrors operating in the 8–12 nm extreme ultraviolet wavelength region. To extend the
working bandwidth beyond the L-edge of silcon, we theoretically design broadband
Pd/B4C multilayers. We discuss the influence of the desired reflectance of
the plateau, number of bilayers, and the real structural parameters, including the
interface widths, layer density, and thickness deviation, on the reflectivity profile.
Assuming the interface width to be 0.6 nm, we design aperiodic multilayers for broad
wavebands of 9.0–10.0, 8.5–10.5, and 8.0–11.0 nm, with average reflectivities of 3.1%,
5.0%, and 9.5%, respectively.
© 2016 Chinese Laser Press
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