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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 14,
  • Issue 1,
  • pp. 011404-
  • (2016)

Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics

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Abstract

During the formation of sub-wavelength ripples, the initial surface plasmon (SP)-laser interference plays an important role. In this Letter, the effects of grating structures on the distribution of the absorbed laser intensity, SP-laser coupling, free electron distributions, and ablation shapes are investigated by the plasma model, taking into consideration both the laser wave-particle duality and the transient localized changes of material properties. The simulation results show that the grating structures can strongly enhance the energy absorption and SP-laser coupling, which makes the fabrication of sub-wavelength ripples more efficient. It is also found that the ablation shapes, in terms of ablation depths and sub-wavelength ripples periods, are strongly related to the grating structures, which can be used to control micro/nanostructures precisely and uniformly.

© 2015 Chinese Laser Press

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