In conventional pulsed laser deposition (PLD) technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition distribution for a multicomponent film and eventually leading to low device quality and low rate of final products. We present a novel method based on PLD for depositing large CIGS films with uniform thickness and stoichiometry. By oscillating a mirror placed coaxially with the incident laser beam, the laser's focus is scanned across the rotating target surface. This arrangement maintains a constant reflectance and optical distance, ensuring that a consistent energy density is delivered to the target surface by each laser pulse. Scanning the laser spot across the target suppresses the formation of micro-columns, and thus the plume deflection effect that reduces film uniformity in conventional PLD technique is eliminated. This coaxial scanning PLD method is used to deposit a CIGS film, 500 nm thick, with thickness uniformity exceeding ±3% within a 5 cm diameter, and exhibiting a highly homogeneous elemental distribution.
© 2014 Chinese Optics LettersPDF Article