Abstract

A model is developed to improve thickness uniformity of coatings on spherical substrates rapidly and automatically using fixed shadow masks in a planetary rotation system. The coating thickness is accurately represented by a function composed of basic thickness, self-shadow effect, and shadow mask function. A type of mask with parabolic contours is proposed, and the thickness uniformity of coatings on spherical substrates can be improved in a large range of ratios of clear aperture (CA) to radius of curvature (RoC) by optimizing shadow masks using a numerical optimization algorithm. Theoretically, the thickness uniformity improves to more than 97.5% of CA/RoC from -1.9 to 1.9. Experimentally, the thickness uniformities of coatings on a convex spherical substrate (CA/RoC = 1.53) and on a concave spherical substrate (CA/RoC=-1.65) improve to be better than 98.5% after corrected by the shadow masks.

© 2014 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7067, 070608 (2008).
  2. H. J. Qi, M. P. Zhu, W. L. Zhang, K. Yi, H. B. He, and J. D. Shao, Chin. Opt. Lett. 10, 013104 (2012).
  3. M. Gross, S. Dligatch, and A. Chtanov, Appl. Opt. 50, C316 (2011).
  4. C. Guo, M. D. Kong, C. D. Liu, and B. C. Li, Appl. Opt. 52, B26 (2013).
  5. C. D. Liu, M. D. Kong, C. Guo, W. D. Gao, and B. C. Li, Opt. Express 20, 23790 (2012).
  6. J. B. Oliver and D. Talbot, Appl. Opt. 45, 3097 (2006).
  7. F. Villa, A. Martinez, and L. E. Regalado, Appl. Opt. 39, 1602 (2000).
  8. F. Villa and O. Pompa, Appl. Opt. 38, 695 (1999).
  9. C. Liu, C. Guo, M. Kong, and B. Li, Chin. Opt. Lett. 11, S10213 (2013).
  10. Y. Q. Hou, H. J. Qi, K. Yi, and J. D. Shao, Chin. Opt. Lett. 11, 103101 (2013).
  11. P. G. Antal and R. Szipocs, Chin. Opt. Lett. 10, 053101 (2012).
  12. R. Swanepoel, J. Phys. E Sci. Instrum. 16, 1214 (1983).

2013 (3)

2012 (3)

2011 (1)

2008 (1)

P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7067, 070608 (2008).

2006 (1)

2000 (1)

1999 (1)

1983 (1)

R. Swanepoel, J. Phys. E Sci. Instrum. 16, 1214 (1983).

Antal, P. G.

Chtanov, A.

Dligatch, S.

Gao, W. D.

Gross, M.

Guo, C.

He, H. B.

Hou, Y. Q.

Kelkar, P.

P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7067, 070608 (2008).

Kong, M.

C. Liu, C. Guo, M. Kong, and B. Li, Chin. Opt. Lett. 11, S10213 (2013).

Kong, M. D.

Li, B.

C. Liu, C. Guo, M. Kong, and B. Li, Chin. Opt. Lett. 11, S10213 (2013).

Li, B. C.

Liu, C.

C. Liu, C. Guo, M. Kong, and B. Li, Chin. Opt. Lett. 11, S10213 (2013).

Liu, C. D.

Martinez, A.

Oliver, J. B.

Peterson, D.

P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7067, 070608 (2008).

Pompa, O.

Qi, H. J.

Regalado, L. E.

Shao, J. D.

Swanepoel, R.

R. Swanepoel, J. Phys. E Sci. Instrum. 16, 1214 (1983).

Szipocs, R.

Talbot, D.

Tirri, B.

P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7067, 070608 (2008).

Villa, F.

Wilklow, R.

P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, Proc. SPIE 7067, 070608 (2008).

Yi, K.

Zhang, W. L.

Zhu, M. P.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.