Abstract

A modified extended-ptychographical-iterative-engine (ePIE) algorithm is proposed to overcome the disadvantages of ePIE technique and reduce the influence of stage hysteresis or backlash error. The exit wave of a rotatable "screen" illuminated by plane wave is used as the illumination on the specimen, and the complex transmission functions of the rotatable object and specimen can be simultaneously reconstructed. Compared with the standard x-y scanning PIE algorithm, the proposed algorithm can completely avoid the influence of stage hysteresis (or backlash error). The proposed algorithm also has higher convergence speed and better accuracy than the standard PIE algorithm.

© 2014 Chinese Optics Letters

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2013 (3)

W. Chen, G. Situ, and X. Chen. Opt. Express 21, 24680 (2013).

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

X. Pan, S. P. Veetil, C. Liu, Q. Lin, and J. Zhu, Chin. Opt. Lett. 11, 021103 (2013).

2012 (1)

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

2010 (1)

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A. M. Maiden and J. M. Rodenburg, Ultramicroscopy 109, 1256 (2009).

C. Liu, T. Walther, and J. M. Rodenburg, Ultramicroscopy 109, 1263 (2009).

2007 (2)

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

F. Zhang, G. Pedrini, and W. Osten, Phys. Rev. A 75, 043805 (2007).

2004 (2)

J. M. Rodenburg and H. M. L. Faulkner, Appl. Phys. Lett. 85, 4795 (2004).

H. M. L. Faulkner and J. M. Rodenburg, Phys. Rev. Lett. 93, 023903 (2004).

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1982 (1)

1978 (1)

1972 (1)

R. W. Gerchberg, Optik 35, 237 (1972).

Bunk, O.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Chen, W.

W. Chen, G. Situ, and X. Chen. Opt. Express 21, 24680 (2013).

W. Chen and X. Chen, Opt. Express 18, 13536 (2010).

Chen, X.

Cullis, A. G.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

David, C.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Dobson, B. R.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Faulkner, H. M. L.

J. M. Rodenburg and H. M. L. Faulkner, Appl. Phys. Lett. 85, 4795 (2004).

H. M. L. Faulkner and J. M. Rodenburg, Phys. Rev. Lett. 93, 023903 (2004).

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R. W. Gerchberg, Optik 35, 237 (1972).

Huang, H.

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

Humphry, M. J.

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

Hurst, A. C.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Jefimovs, K.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Johnson, I.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

K¨ostli, K. P.

Kraus, B.

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

Lin, Q.

Liu, C.

X. Pan, S. P. Veetil, C. Liu, Q. Lin, and J. Zhu, Chin. Opt. Lett. 11, 021103 (2013).

C. Liu, T. Walther, and J. M. Rodenburg, Ultramicroscopy 109, 1263 (2009).

Liu, F.

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

Liu, Z.

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

Maiden, A. M.

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

A. M. Maiden and J. M. Rodenburg, Ultramicroscopy 109, 1256 (2009).

Osten, W.

F. Zhang, G. Pedrini, and W. Osten, Phys. Rev. A 75, 043805 (2007).

Pan, X.

Pedrini, G.

F. Zhang, G. Pedrini, and W. Osten, Phys. Rev. A 75, 043805 (2007).

Pfeiffer, F.

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Rodenburg, J. M.

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

C. Liu, T. Walther, and J. M. Rodenburg, Ultramicroscopy 109, 1263 (2009).

A. M. Maiden and J. M. Rodenburg, Ultramicroscopy 109, 1256 (2009).

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

J. M. Rodenburg and H. M. L. Faulkner, Appl. Phys. Lett. 85, 4795 (2004).

H. M. L. Faulkner and J. M. Rodenburg, Phys. Rev. Lett. 93, 023903 (2004).

Sarahan, M. C.

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

Situ, G.

W. Chen, G. Situ, and X. Chen. Opt. Express 21, 24680 (2013).

Veetil, S. P.

Walther, T.

C. Liu, T. Walther, and J. M. Rodenburg, Ultramicroscopy 109, 1263 (2009).

Zhang, F.

F. Zhang, G. Pedrini, and W. Osten, Phys. Rev. A 75, 043805 (2007).

Zheng, L.

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

Zhu, J.

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

X. Pan, S. P. Veetil, C. Liu, Q. Lin, and J. Zhu, Chin. Opt. Lett. 11, 021103 (2013).

and X. Chen. Opt. Express (1)

W. Chen, G. Situ, and X. Chen. Opt. Express 21, 24680 (2013).

Appl. Opt. (3)

Appl. Phys. Lett. (1)

J. M. Rodenburg and H. M. L. Faulkner, Appl. Phys. Lett. 85, 4795 (2004).

Chin. Opt. Lett. (1)

High Power Laser Sci. Eng. (1)

F. Liu, Z. Liu, L. Zheng, H. Huang, and J. Zhu, High Power Laser Sci. Eng. 1, 29 (2013).

Opt. Express (1)

Opt. Lett. (1)

Optik (1)

R. W. Gerchberg, Optik 35, 237 (1972).

Phys. Rev. A (1)

F. Zhang, G. Pedrini, and W. Osten, Phys. Rev. A 75, 043805 (2007).

Phys. Rev. Lett. (2)

H. M. L. Faulkner and J. M. Rodenburg, Phys. Rev. Lett. 93, 023903 (2004).

J. M. Rodenburg, A. C. Hurst, A. G. Cullis, B. R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, Phys. Rev. Lett. 98, 034801 (2007).

Ultramicroscopy (3)

C. Liu, T. Walther, and J. M. Rodenburg, Ultramicroscopy 109, 1263 (2009).

A. M. Maiden and J. M. Rodenburg, Ultramicroscopy 109, 1256 (2009).

A. M. Maiden, M. J. Humphry, M. C. Sarahan, B. Kraus, and J. M. Rodenburg, Ultramicroscopy 120, 64 (2012).

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