Abstract

We report the direct fabrication of a microfluidic chip composed of two high-aspect ratio microfluidic channels with lengths of 3.5 cm and 8 mm in a glass substrate by femtosecond laser micromachining. The fabrication mainly consists of two steps: 1) writing microchannels and microchambers in a porous glass by scanning a tightly focused laser beam; 2) high-temperature annealing of the glass sample to collapse all the nanopores in the glass. Migration of derivatized amino acids is observed in the microfluidic channel by applying electric voltage across the long-migration microchannel.

© 2013 Chinese Optics Letters

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2013

2012

Y. Li, X. Gao, M. Jiang, Q. Sun, and J. Tian, Chin. Opt. Lett. 10, 102201 (2012).

K. Sugioka and Y. Cheng, Lab on a Chip 12, 3576 (2012).

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

2011

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

2010

2008

Y. Wu, C.-Y. Wang, W. Jia, X. Ni, M. Hu, and L. Chai, Chin. Opt. Lett. 6, 51 (2008).

Y. Liao, J. Xu, H. Sun, J. Song, X. Wang, and Y. Cheng, Appl. Surf. Sci. 254, 7018 (2008).

2006

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

G. M. Whitesides, Nature 442, 368 (2006).

2005

Y. Cheng, K. Sugioka, and K. Midorikawa, Appl Surf. Sci. 248, 172 (2005).

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).

2004

M. S. Giridhar, K. Seong, A. Schuzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, Appl. Opt. 43, 4584 (2004).

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A Mater. Sci. Process. 79, 605 (2004).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

2001

2000

B.-H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).

1990

A. Manz, N. Graber, and H. M. Widmer, Sens. Actuators B1, 244 (1990).

Akai, T.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).

An, R.

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

Beebe, D. J.

B.-H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).

Bellini, N.

Cerullo, G.

Chai, L.

Chen, D.

Y. Liao, Y. Shen, L. Qiao, D. Chen, Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 38, 187 (2013).

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).

Chen, X.

Cheng, Y.

Y. Liao, Y. Shen, L. Qiao, D. Chen, Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 38, 187 (2013).

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

K. Sugioka and Y. Cheng, Lab on a Chip 12, 3576 (2012).

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).

Y. Liao, J. Xu, H. Sun, J. Song, X. Wang, and Y. Cheng, Appl. Surf. Sci. 254, 7018 (2008).

Y. Cheng, K. Sugioka, and K. Midorikawa, Appl Surf. Sci. 248, 172 (2005).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

Choi, T. Y.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A Mater. Sci. Process. 79, 605 (2004).

Dongre, C.

Dou, Y.

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

Gao, X.

Giridhar, M. S.

Gong, Q.

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

Graber, N.

A. Manz, N. Graber, and H. M. Widmer, Sens. Actuators B1, 244 (1990).

Grigoropoulos, C. P.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A Mater. Sci. Process. 79, 605 (2004).

He, F.

Hoekstra, H. J. W. M.

Hongo, T.

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

Hu, M.

Hwang, D. J.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A Mater. Sci. Process. 79, 605 (2004).

Itoh, K.

Jia, W.

Jiang, M.

Jiang, Y.

Jo, B.-H.

B.-H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).

Ju, Y.

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

Juodkazis, S.

Khulbe, P.

Kuroda, D.

Lerberghe, L. M. V.

B.-H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).

Li, E.

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Li, Y.

Liao, Y.

Y. Liao, Y. Shen, L. Qiao, D. Chen, Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 38, 187 (2013).

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).

Y. Liao, J. Xu, H. Sun, J. Song, X. Wang, and Y. Cheng, Appl. Surf. Sci. 254, 7018 (2008).

Liu, D.

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

Luo, Y.

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Mansuripur, M.

Manz, A.

A. Manz, N. Graber, and H. M. Widmer, Sens. Actuators B1, 244 (1990).

Marcinkevicius, A.

Masuda, M.

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

Matsuo, S.

Midorikawa, K.

Y. Liao, Y. Shen, L. Qiao, D. Chen, Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 38, 187 (2013).

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).

Y. Cheng, K. Sugioka, and K. Midorikawa, Appl Surf. Sci. 248, 172 (2005).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

Misawa, H.

Miwa, M.

Miyoshi, H.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).

Motsegood, K. M.

B.-H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).

Ni, X.

Nishii, J.

Osellame, R.

Peyghambarian, N.

Pollnau, M.

Qiao, L.

Schuzgen, A.

Seong, K.

Shen, Y.

Sheng, Y.

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Shihoyama, K.

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

Song, J.

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Y. Liao, J. Xu, H. Sun, J. Song, X. Wang, and Y. Cheng, Appl. Surf. Sci. 254, 7018 (2008).

Sugioka, K.

Y. Liao, Y. Shen, L. Qiao, D. Chen, Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 38, 187 (2013).

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

K. Sugioka and Y. Cheng, Lab on a Chip 12, 3576 (2012).

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).

Y. Cheng, K. Sugioka, and K. Midorikawa, Appl Surf. Sci. 248, 172 (2005).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

Sun, H.

Sun, Q.

Tian, J.

Wang, C.

Wang, C.-Y.

Wang, X.

Y. Liao, J. Xu, H. Sun, J. Song, X. Wang, and Y. Cheng, Appl. Surf. Sci. 254, 7018 (2008).

Watanabe, M.

Watanabe, W.

Weeghel, R. van

Weerd, J. van

Whitesides, G. M.

G. M. Whitesides, Nature 442, 368 (2006).

Widmer, H. M.

A. Manz, N. Graber, and H. M. Widmer, Sens. Actuators B1, 244 (1990).

Wu, Y.

Xu, J.

Xu, Y.

Xu, Z.

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, Opt. Lett. 35, 282 (2010).

Yamada, K.

Yang, H.

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

Yazawa, T.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).

Zhang, L.

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

Zhang, Q.

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Opt. Lett. 35, 3225 (2010).

Zhou, Z.

Appl Surf. Sci.

Y. Cheng, K. Sugioka, and K. Midorikawa, Appl Surf. Sci. 248, 172 (2005).

Appl. Opt.

Appl. Phys. A Mater. Sci. Process.

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A Mater. Sci. Process. 79, 605 (2004).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, Appl. Phys. A Mater. Sci. Process. 79, 815 (2004).

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, Appl. Phys. A Mater. Sci. Process. 83, 27 (2006).

Appl. Phys. Lett.

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).

Appl. Surf. Sci.

Y. Liao, J. Xu, H. Sun, J. Song, X. Wang, and Y. Cheng, Appl. Surf. Sci. 254, 7018 (2008).

Biomed. Opt. Express

Chin. Opt. Lett.

J. Microelectromech. Syst.

B.-H. Jo, L. M. V. Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).

Lab on a Chip

Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Lab on a Chip 12, 746 (2012).

K. Sugioka and Y. Cheng, Lab on a Chip 12, 3576 (2012).

Microfluidics and Nanofluidics

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, Microfluidics and Nanofluidics 11, 111 (2011).

Nature

G. M. Whitesides, Nature 442, 368 (2006).

Opt. Lett.

Sens. Actuators

A. Manz, N. Graber, and H. M. Widmer, Sens. Actuators B1, 244 (1990).

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