Abstract

A novel broadband transmission method to determine polymer film thickness during manufacturing is proposed, and a measurement system is developed based on this method. The relationship between broadband optical power and film thickness is deduced according to the Lambert-Beer law. The system is composed of a halogen light and an optical power meter. Results show that the measurement error of this method is approximately 1 \mm m, and the resolution of the system is below 0.4 <i>μ</i>m for polymer films with less than 100-<i>μ</i>m thickness.

© 2013 Chinese Optics Letters

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  1. L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).
  2. D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).
  3. A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).
  4. H. Song and C. Wu, Chin. Opt. Lett. 5, 712 (2007).
  5. J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).
  6. X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).
  7. L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).
  8. J. Dong and R. Lu, Appl. Opt. 51, 5668 (2012).
  9. J. W. You, S. Kim, and D. Kim, Opt. Express 16, 21022 (2008).
  10. C. B. Walsh and E. I. Franses, Thin Solid Films 347, 167 (1999).
  11. J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).
  12. Y. Shirakawa, Appl. Radiat. Isotopes 53, 581 (2000).
  13. L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).
  14. F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).
  15. D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).
  16. J. Johnson and T. Harris, Appl. Opt. 49, 2920 (2010).
  17. J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).
  18. Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).
  19. C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).
  20. C. H. Hidrovo and D. P. Hart, Meas. Sci. Technol. 12, 467 (2001).
  21. C. Qiu and X. Sun, Spectrosc. Spect. Anal. (in Chinese) 33, 163 (2013).

2013 (1)

C. Qiu and X. Sun, Spectrosc. Spect. Anal. (in Chinese) 33, 163 (2013).

2012 (2)

J. Dong and R. Lu, Appl. Opt. 51, 5668 (2012).

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

2011 (3)

C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).

2010 (2)

J. Johnson and T. Harris, Appl. Opt. 49, 2920 (2010).

J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).

2008 (2)

D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).

J. W. You, S. Kim, and D. Kim, Opt. Express 16, 21022 (2008).

2007 (3)

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

H. Song and C. Wu, Chin. Opt. Lett. 5, 712 (2007).

L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).

2006 (1)

F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).

2005 (2)

J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).

L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).

2004 (1)

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

2001 (2)

C. H. Hidrovo and D. P. Hart, Meas. Sci. Technol. 12, 467 (2001).

Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).

2000 (1)

Y. Shirakawa, Appl. Radiat. Isotopes 53, 581 (2000).

1999 (1)

C. B. Walsh and E. I. Franses, Thin Solid Films 347, 167 (1999).

Alexiadis, D.

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

Antiochia, R.

L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).

Bara, J. E.

D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).

Bikiaris, D.

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

Campanella, L.

L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).

Chai, L.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Chen, K.

L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).

Christine, S.

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

Damtsios, A.

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

Das, A.

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Dong, J.

Dost, R.

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Dragone, R.

L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).

Elliott, B. J.

D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).

Fan, Y.

L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).

Fothergill, J. C.

Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).

Franses, E. I.

C. B. Walsh and E. I. Franses, Thin Solid Films 347, 167 (1999).

Gan, Y.

X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).

Gin, D. L.

D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).

Gray, C.

C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).

Grell, M.

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Grunlan, J. C.

J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).

Gu, J.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Guo, L.

L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).

Han, J.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Hanning, C. D.

Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).

Harris, T.

Hart, D. P.

C. H. Hidrovo and D. P. Hart, Meas. Sci. Technol. 12, 467 (2001).

He, M.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Heikki, V.

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

Hidrovo, C. H.

C. H. Hidrovo and D. P. Hart, Meas. Sci. Technol. 12, 467 (2001).

Hirakawa, S.

F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).

Hong, X.

X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).

Im, J.

J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).

Itoh, M.

F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).

Johnson, J.

Jones, N. B.

Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).

Karagiannis, G.

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

Kim, D.

Kim, S.

Koutri, I.

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

Lavagnini, I.

L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).

Liu, F.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Lu, R.

Ly, T.

J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).

Magali, L.

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

Manno, V. P.

C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).

Markku, R.

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

Mehrabi, A. R.

J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).

Morrison, J. J.

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Noble, R. D.

D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).

Qiu, C.

C. Qiu and X. Sun, Spectrosc. Spect. Anal. (in Chinese) 33, 163 (2013).

Richardson, T.

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Rogers, C. B.

C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).

Sengupta, S. K.

J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).

Shirakawa, Y.

Y. Shirakawa, Appl. Radiat. Isotopes 53, 581 (2000).

Song, H.

Sun, X.

C. Qiu and X. Sun, Spectrosc. Spect. Anal. (in Chinese) 33, 163 (2013).

Tian, Z.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Tojo, F.

F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).

Toyoda, T.

F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).

Turner, M. L.

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Tuulikki, H. P.

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

Walsh, C. B.

C. B. Walsh and E. I. Franses, Thin Solid Films 347, 167 (1999).

Wang, C.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Wang, Q.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Wang, Y.

X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).

White, R. D.

C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).

Whitten, J. E.

J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).

Wu, C.

Xing, Q.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Xu, Y.

Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).

You, J. W.

Zhang, G.

L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).

Zhang, W.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Zhang, X.

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Adv. Mater. (1)

A. Das, R. Dost, T. Richardson, M. Grell, J. J. Morrison, and M. L. Turner, Adv. Mater. 19, 4018 (2007).

Appl. Opt. (2)

Appl. Radiat. Isotopes (1)

Y. Shirakawa, Appl. Radiat. Isotopes 53, 581 (2000).

Chin. Opt. Lett. (2)

H. Song and C. Wu, Chin. Opt. Lett. 5, 712 (2007).

J. Gu, C. Wang, Z. Tian, F. Liu, X. Zhang, J. Han, M. He, Q. Xing, W. Zhang, L. Chai, and Q. Wang, Chin. Opt. Lett. 9, S10404 (2011).

Eur. J. Pharm. Sci. (1)

L. Magali, H. P. Tuulikki, S. Christine, R. Markku, and V. Heikki, Eur. J. Pharm. Sci. 21, 493 (2004).

Exp. Fluids (1)

C. Gray, C. B. Rogers, V. P. Manno, and R. D. White, Exp. Fluids 51, 281 (2011).

IEEE Sensors J. (1)

F. Tojo, S. Hirakawa, T. Toyoda, and M. Itoh, IEEE Sensors J. 6, 1309 (2006).

Int. J. Pharm. (1)

D. Bikiaris, I. Koutri, D. Alexiadis, A. Damtsios, and G. Karagiannis, Int. J. Pharm. 438, 33 (2012).

Intern. J. Environ. Anal. Chem. (1)

L. Campanella, R. Antiochia, R. Dragone, and I. Lavagnini, Intern. J. Environ. Anal. Chem. 85, 959 (2005).

Macromol. Rapid Commun. (1)

D. L. Gin, J. E. Bara, R. D. Noble, and B. J. Elliott, Macromol. Rapid Commun. 29, 367 (2008).

Meas. Sci. Technol. (2)

J. C. Grunlan, A. R. Mehrabi, and T. Ly, Meas. Sci. Technol. 16, 153 (2005).

C. H. Hidrovo and D. P. Hart, Meas. Sci. Technol. 12, 467 (2001).

Opt. Express (1)

Opt. Laser Eng. (1)

Y. Xu, N. B. Jones, J. C. Fothergill, and C. D. Hanning, Opt. Laser Eng. 36, 607 (2001).

Proc. SPIE (1)

L. Guo, Y. Fan, G. Zhang, and K. Chen, Proc. SPIE 6834, 30 (2007).

Rev. Sci. Instrum. (1)

J. Im, S. K. Sengupta, and J. E. Whitten, Rev. Sci. Instrum. 81, 034103 (2010).

Spectrosc. Spect. Anal. (in Chinese) (1)

C. Qiu and X. Sun, Spectrosc. Spect. Anal. (in Chinese) 33, 163 (2013).

Surf. Interface Anal. (1)

X. Hong, Y. Gan, and Y. Wang, Surf. Interface Anal. 43, 1299 (2011).

Thin Solid Films (1)

C. B. Walsh and E. I. Franses, Thin Solid Films 347, 167 (1999).

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