Abstract

We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238°. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.

© 2013 Chinese Optics Letters

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2011 (2)

K. A. G. Prakash, S. Dhabai, E. Bhattacharya, and S. Bhattacharya, IEEE Sensor. J. 11, 1019 (2011).

X. Mo, Z. Wen, Z. Zhang, and Y. Guo, Acta Photo. Sin. (in Chinese) 40, 1357 (2011).

2010 (1)

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

2009 (2)

2007 (1)

2006 (1)

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

2005 (1)

U. Wallrabe, C. Solf, J. Mohr, and J. G. Korvink, Sensor. Actuator. Phys. 123-124, 459 (2005).

2002 (1)

J. Genest and P. Tremblay, Vib. Spectros. 29, 3 (2002).

1999 (2)

F. Lee, G. Zhou, H. Yu, and F. S. Chau, Sensor. Actuator. Phys. 149, 221 (1999).

O. Manzardo, H. P. Herzig, C. R. Marxer, and N. F. de Rooij, Opt. Lett. 24, 1705 (1999).

1997 (1)

L. B. Xiang L. bing, J. F. Yang, Z. Gao, and G. X. Liu, Acta Photon. Sin. (in Chinese) 26, 132 (1997).

Abdullayeva, S. N.

Agayev, J. A.

Aliyev, D. Z.

Asadov, H. H.

Ataman, C.

C. Ataman and U. Hakan, Sensor. Actuator. Phys. 151, 9 (2009).

Azimova, S. R.

Bhattacharya, E.

K. A. G. Prakash, S. Dhabai, E. Bhattacharya, and S. Bhattacharya, IEEE Sensor. J. 11, 1019 (2011).

Bhattacharya, S.

K. A. G. Prakash, S. Dhabai, E. Bhattacharya, and S. Bhattacharya, IEEE Sensor. J. 11, 1019 (2011).

bing, L. B. Xiang L.

L. B. Xiang L. bing, J. F. Yang, Z. Gao, and G. X. Liu, Acta Photon. Sin. (in Chinese) 26, 132 (1997).

Chau, F. S.

F. Lee, G. Zhou, H. Yu, and F. S. Chau, Sensor. Actuator. Phys. 149, 221 (1999).

Chen, D.

Chen, J.

Chen, W. M.

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Cui, Y.

Dhabai, S.

K. A. G. Prakash, S. Dhabai, E. Bhattacharya, and S. Bhattacharya, IEEE Sensor. J. 11, 1019 (2011).

Gao, Z.

L. B. Xiang L. bing, J. F. Yang, Z. Gao, and G. X. Liu, Acta Photon. Sin. (in Chinese) 26, 132 (1997).

Genest, J.

J. Genest and P. Tremblay, Vib. Spectros. 29, 3 (2002).

Guo, Y.

X. Mo, Z. Wen, Z. Zhang, and Y. Guo, Acta Photo. Sin. (in Chinese) 40, 1357 (2011).

Hakan, U.

C. Ataman and U. Hakan, Sensor. Actuator. Phys. 151, 9 (2009).

Herzig, H. P.

Huang, S. L.

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Kan, R.

Korvink, J. G.

U. Wallrabe, C. Solf, J. Mohr, and J. G. Korvink, Sensor. Actuator. Phys. 123-124, 459 (2005).

Krishnamoorthy, U.

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

Lee, D.

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

Lee, F.

F. Lee, G. Zhou, H. Yu, and F. S. Chau, Sensor. Actuator. Phys. 149, 221 (1999).

Liu, G. X.

L. B. Xiang L. bing, J. F. Yang, Z. Gao, and G. X. Liu, Acta Photon. Sin. (in Chinese) 26, 132 (1997).

Liu, J.

Liu, W.

Manzardo, O.

Marxer, C. R.

Mirzabalayev, I. M.

Mo, X.

X. Mo, Z. Wen, Z. Zhang, and Y. Guo, Acta Photo. Sin. (in Chinese) 40, 1357 (2011).

Mohr, J.

U. Wallrabe, C. Solf, J. Mohr, and J. G. Korvink, Sensor. Actuator. Phys. 123-124, 459 (2005).

Nabiyev, N. A.

Park, N.

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

Prakash, K. A. G.

K. A. G. Prakash, S. Dhabai, E. Bhattacharya, and S. Bhattacharya, IEEE Sensor. J. 11, 1019 (2011).

Rooij, N. F. de

Solf, C.

U. Wallrabe, C. Solf, J. Mohr, and J. G. Korvink, Sensor. Actuator. Phys. 123-124, 459 (2005).

Solgaard, O.

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

Tremblay, P.

J. Genest and P. Tremblay, Vib. Spectros. 29, 3 (2002).

Wallrabe, U.

U. Wallrabe, C. Solf, J. Mohr, and J. G. Korvink, Sensor. Actuator. Phys. 123-124, 459 (2005).

Wang, M.

Wang, N.

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Wei, W.

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Wen, Z.

X. Mo, Z. Wen, Z. Zhang, and Y. Guo, Acta Photo. Sin. (in Chinese) 40, 1357 (2011).

Yang, J. F.

L. B. Xiang L. bing, J. F. Yang, Z. Gao, and G. X. Liu, Acta Photon. Sin. (in Chinese) 26, 132 (1997).

Yu, H.

F. Lee, G. Zhou, H. Yu, and F. S. Chau, Sensor. Actuator. Phys. 149, 221 (1999).

Yu, K.

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

Zhang, J.

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Zhang, Y.

Zhang, Z.

X. Mo, Z. Wen, Z. Zhang, and Y. Guo, Acta Photo. Sin. (in Chinese) 40, 1357 (2011).

Zhou, G.

F. Lee, G. Zhou, H. Yu, and F. S. Chau, Sensor. Actuator. Phys. 149, 221 (1999).

Zhu, Y.

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Acta Photo. Sin. (in Chinese) (1)

X. Mo, Z. Wen, Z. Zhang, and Y. Guo, Acta Photo. Sin. (in Chinese) 40, 1357 (2011).

Acta Photon. Sin. (in Chinese) (1)

L. B. Xiang L. bing, J. F. Yang, Z. Gao, and G. X. Liu, Acta Photon. Sin. (in Chinese) 26, 132 (1997).

Chin. Opt. Lett. (2)

IEEE Sensor. J. (1)

K. A. G. Prakash, S. Dhabai, E. Bhattacharya, and S. Bhattacharya, IEEE Sensor. J. 11, 1019 (2011).

Opt. Lett. (1)

Sensor. Actuator. Phys. (4)

C. Ataman and U. Hakan, Sensor. Actuator. Phys. 151, 9 (2009).

F. Lee, G. Zhou, H. Yu, and F. S. Chau, Sensor. Actuator. Phys. 149, 221 (1999).

K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, Sensor. Actuator. Phys. 130-131, 523 (2006).

U. Wallrabe, C. Solf, J. Mohr, and J. G. Korvink, Sensor. Actuator. Phys. 123-124, 459 (2005).

Spectroscopy and Spectral Analysis (in Chinese) (1)

W. Wei, S. L. Huang, W. M. Chen, N. Wang, J. Zhang, and Y. Zhu, Spectroscopy and Spectral Analysis (in Chinese) 30, 846 (2010).

Vib. Spectros. (1)

J. Genest and P. Tremblay, Vib. Spectros. 29, 3 (2002).

Other (2)

W. Lu, H. Yuan, and G. Xu, Modern Near-infrared Spectrum Analysis Technology (in Chinese) (Petrochemical Press, Beijing, 2006).

S. Weng, Fourier Transform Infrared Spectrometer (in Chinese) (Chemical Industry Press, Beijing, 2005).

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