A temperature-compensated fiber optic Fabry-Perot accelerometer (FOFPA) formed by symmetrically bonding an all-silica in-line fiber Fabry-Perot etalon (ILFFPE) and a piezoelectric ceramic unimorph actuator (PCUA) to two surfaces of a silica cantilever is reported. The all-silica ILFFPE with feedback-controlled cavity length by the PCUA simultaneously senses acceleration and temperature. The results indicate that the fabricated FOFPA system simultaneously senses acceleration and temperature with active temperature compensation. The nonlinearity of the output voltage to acceleration is less than 0.65%. The nonlinearity of the control voltage to temperature is 1.75%. Furthermore, the maximum deviation of the sensitivity with temperature compensation at a temperature range from 25 to 50 oC is 0.025 V/g.
© 2013 Chinese Optics LettersPDF Article