Abstract

We study nanometer copper thin films prepared by magnetron sputtering and treated with laser shock processing (LSP). We observe the formation of firstborn twin crystals and some complete twin crystals in the copper thin films. After LSP, scanning electron microscope (SEM) images show obvious plastic deformation of the copper grain on the film surface, dramatically increased grain size, and the appearance of a large number of twin crystals. Moreover, the width of the crystals is a few dozen nanometers, and the cross angle is more than or close to 90°. Many vacancy defects appear during the sliding of atomic plane, which leads to a faulty structure; however, no obvious dislocation is observed. These substructures play a significant role in improving the mechanical performance of nanometer copper thin films.

© 2013 Chinese Optics Letters

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).
  2. P. G Sanders, J. A. Eastman, and J. R. Weertma, Acta Mater. 10, 4019 (1997).
  3. C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).
  4. E. M. Bringa and A. Caro, Science 5742, 1838 (2005).
  5. L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).
  6. Y. Wang, M. Chen, and F. Zhou, E. Ma. Nature 6910, 912 (2002).
  7. L. Lu, M. L. Sui, and K. Lu, Science 25, 1463 (2002).
  8. Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).
  9. M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

2006

M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

2005

E. M. Bringa and A. Caro, Science 5742, 1838 (2005).

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

2004

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

2002

Y. Wang, M. Chen, and F. Zhou, E. Ma. Nature 6910, 912 (2002).

L. Lu, M. L. Sui, and K. Lu, Science 25, 1463 (2002).

R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).

2001

C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).

1997

P. G Sanders, J. A. Eastman, and J. R. Weertma, Acta Mater. 10, 4019 (1997).

Alexandrov, I. V.

R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).

Bringa, E. M.

E. M. Bringa and A. Caro, Science 5742, 1838 (2005).

Caro, A.

E. M. Bringa and A. Caro, Science 5742, 1838 (2005).

Chen, M.

Y. Wang, M. Chen, and F. Zhou, E. Ma. Nature 6910, 912 (2002).

Chen, X. H.

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

Dao, M.

M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

Eastman, J. A.

P. G Sanders, J. A. Eastman, and J. R. Weertma, Acta Mater. 10, 4019 (1997).

Hugo, R. C.

C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).

Jin, Z. H.

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

Kung, H. H.

C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).

Lei, L.

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

lowe, T. C.

R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).

Lu, K.

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

L. Lu, M. L. Sui, and K. Lu, Science 25, 1463 (2002).

Lu, L.

M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

L. Lu, M. L. Sui, and K. Lu, Science 25, 1463 (2002).

Lu, Q. H.

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

Qian, L.

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

Sanders, P. G

P. G Sanders, J. A. Eastman, and J. R. Weertma, Acta Mater. 10, 4019 (1997).

Shen, Y. F.

M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

Sui, M. L.

L. Lu, M. L. Sui, and K. Lu, Science 25, 1463 (2002).

Suresh, S.

M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

Valiev, R. Z.

R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).

Wang, Y.

Y. Wang, M. Chen, and F. Zhou, E. Ma. Nature 6910, 912 (2002).

Weertma, J. R.

P. G Sanders, J. A. Eastman, and J. R. Weertma, Acta Mater. 10, 4019 (1997).

Weertman., J. R

C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).

Youngdahl, C. J.

C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).

Zhou, F.

Y. Wang, M. Chen, and F. Zhou, E. Ma. Nature 6910, 912 (2002).

Zhu, Y. T.

R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).

Acta Mater.

P. G Sanders, J. A. Eastman, and J. R. Weertma, Acta Mater. 10, 4019 (1997).

M. Dao, L. Lu, Y. F. Shen, and S. Suresh, Acta Mater. 54, 5421 (2006).

E. Ma. Nature

Y. Wang, M. Chen, and F. Zhou, E. Ma. Nature 6910, 912 (2002).

J. Mater. Res.

R. Z. Valiev, I. V. Alexandrov, Y. T. Zhu, and T. C. lowe, J. Mater. Res. 17, 5 (2002).

Science

L. Lu, M. L. Sui, and K. Lu, Science 25, 1463 (2002).

E. M. Bringa and A. Caro, Science 5742, 1838 (2005).

L. Lei, Y. F. Shen, X. H. Chen, L. Qian, and K. Lu, Science 5669, 422 (2004).

Scripta. Mater.

C. J. Youngdahl, J. R Weertman., R. C. Hugo, and H. H. Kung, Scripta. Mater. 8, 1475 (2001).

Y. F. Shen, L. Lu, Q. H. Lu, Z. H. Jin, and K. Lu, Scripta. Mater. 52, 989 (2005).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.