Abstract

In contrast to uncoated substrate, a nonlinear relationship of phase shift with the thicknesses of the thin film makes the calculation of wavefront aberration complicated. A program is compiled to calculate the wavefront aberration of multilayer thin film produced by thickness nonuniformity. The physical thickness and the optical phase change on reflection are considered. As an example, the wavefront aberration of the all-dielectric mirror is presented in ArF excimer lithography system with a typical thickness distribution. In addition, the wavefront errors of the thin film at wavelengths of 193 and 633 nm are compared in the one-piece and two-piece arrangements. Results show that the phase shift upon reflection of the thin film produced by thickness nonuniformity is very sensitive to the incident angle, wavelength, and polarization.

© 2012 Chinese Optics Letters

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  1. W. Williams, "NIF large optics metrology software: description and algorithms," (Lawrence Livermore National Laboratory (LLNL), Livermore, CA, 2002).
  2. J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).
  3. M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).
  4. D. W. Reicher and S. A. McCormack, Proc. SPIE 4091, 104 (2000).
  5. Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).
  6. Y. Wang, Y. Zhang, W. Chen, W. Shen, X. Liu, and P. Gu, Appl. Opt. 47, C319 (2008).
  7. J. Ramsay and P. Ciddor, Appl. Opt. 6, 2003 (1967).
  8. R. Knowlden, Proc. SPIE 288, 78 (1981).
  9. H. A. Macleod, Thin-Film Optical Filters (3rd ed.); (Institute of Physics Pub., Philadelphia, 2001).

2009 (1)

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

2008 (1)

2005 (1)

J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

2002 (1)

M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).

2000 (1)

D. W. Reicher and S. A. McCormack, Proc. SPIE 4091, 104 (2000).

1981 (1)

R. Knowlden, Proc. SPIE 288, 78 (1981).

1967 (1)

Bower, C. A.

J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

Chen, W.

Ciddor, P.

Fan, Z.

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

Gu, P.

He, H.

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

Knowlden, R.

R. Knowlden, Proc. SPIE 288, 78 (1981).

Liu, X.

McCormack, S. A.

D. W. Reicher and S. A. McCormack, Proc. SPIE 4091, 104 (2000).

Nii, H.

M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).

Niibe, M.

M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).

Piascik, J. R.

J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

Ramsay, J.

Reicher, D. W.

D. W. Reicher and S. A. McCormack, Proc. SPIE 4091, 104 (2000).

Shao, J.

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

Shao, S.

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

Shen, W.

Stoner, B. R.

J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

Sugie, Y.

M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).

Thompson, J. Y.

J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

Wang, Y.

Xiao, Q.

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

Zhang, Y.

Appl. Opt. (2)

J. Vacuum Sci. & Technol. A (1)

J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

Jpn. J. Appl. Phys. (1)

M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).

Proc. SPIE (2)

D. W. Reicher and S. A. McCormack, Proc. SPIE 4091, 104 (2000).

R. Knowlden, Proc. SPIE 288, 78 (1981).

Thin Solid Films (1)

Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

Other (2)

H. A. Macleod, Thin-Film Optical Filters (3rd ed.); (Institute of Physics Pub., Philadelphia, 2001).

W. Williams, "NIF large optics metrology software: description and algorithms," (Lawrence Livermore National Laboratory (LLNL), Livermore, CA, 2002).

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