Abstract

A prototype 1.55-?m Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.

© 2005 Chinese Optics Letters

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  1. D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).
  2. P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).
  3. F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).
  4. C. J. Chang-Hasnain, IEEE J. Selected Topics in Quantum Electron. 6, 978 (2000).
  5. A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

2003 (1)

D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).

2000 (1)

C. J. Chang-Hasnain, IEEE J. Selected Topics in Quantum Electron. 6, 978 (2000).

1998 (2)

P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).

F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).

1996 (1)

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

Azimi, M.

P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).

Chang-Hasnain, C. J.

C. J. Chang-Hasnain, IEEE J. Selected Topics in Quantum Electron. 6, 978 (2000).

Epmeier, M.

D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).

Haronian, D.

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

Harris, J. S.

F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).

Hohlfeld, D.

D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).

Larson, M. C.

F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).

Lo, Y. H.

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

Mozdy, E.

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

Sugihwo, F.

F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).

Tayebati, P.

P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).

Tran, A. T. T. D.

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

Wang, P.

P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).

Zappe, M.

D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).

Zhu, Z. H.

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

Electron. Lett. (1)

P. Tayebati, P. Wang, and M. Azimi, Electron. Lett. 34, 1967 (1998).

IEEE J. Selected Topics in Quantum Electron. (1)

C. J. Chang-Hasnain, IEEE J. Selected Topics in Quantum Electron. 6, 978 (2000).

IEEE Photon. Technol. Lett. (1)

A. T. T. D. Tran, Y. H. Lo, Z. H. Zhu, D. Haronian, and E. Mozdy, IEEE Photon. Technol. Lett. 8, 393 (1996).

J. Micro- Electro-Mechanical Systems (1)

F. Sugihwo, M. C. Larson, and J. S. Harris, J. Micro- Electro-Mechanical Systems 7, 48 (1998).

Sensors and Actuators A (1)

D. Hohlfeld, M. Epmeier, and M. Zappe, Sensors and Actuators A 93, 103 (2003).

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