Abstract

In this paper, the structure of a top-face-sway electromagnetic micromotor and its principle, fabrication and performance are introduced. A combination of the electromagnetic actuating and the planetary reducing provides this micromotor an advantage of low rotational speed and high torque. In addition, since a flexible coupling absorbs the sway and only outputs rotation, it gives this micromotor a balanced output. The dimension of the micromotor is 5 mm. Its rotation speed has a range of 20 - 860 rpm, and its driving current is 300 mA. The output torque of the micromotor is measured to be 13.0 ?Nm.

© 2005 Chinese Optics Letters

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1999

J. Q. Liang and J. S. Yao, Proc. SPIE 3874, 20 (1999).

Z. Jia, L. D. Wang, J. Q. Liang, and J. S. Yao, Chinese Mechanical Engineering 10, 841 (1999).

1996

Q. Y. Lu and L. F. Che, Chin. J. Scientific Instrument 17, 346 (1996).

1991

H. Guckel, K. J. Skrobis, and T. R. Christenson, J. Micromechanics and Microengineering 1, 135 (1991).

1990

H. Fujita, J. Robotics Soc. Japan 8, 76 (1990).

K. J. Gabriel, J. Robotics Soc. Japan 8, 63 (1990).

1989

L. S. Fan, Y. C. Tai, and R. S. Muller, Sensor Actuators 20, 41 (1989).

Che, L. F.

Q. Y. Lu and L. F. Che, Chin. J. Scientific Instrument 17, 346 (1996).

Christenson, T. R.

H. Guckel, K. J. Skrobis, and T. R. Christenson, J. Micromechanics and Microengineering 1, 135 (1991).

Fan, L. S.

L. S. Fan, Y. C. Tai, and R. S. Muller, Sensor Actuators 20, 41 (1989).

Fujita, H.

H. Fujita, J. Robotics Soc. Japan 8, 76 (1990).

Gabriel, K. J.

K. J. Gabriel, J. Robotics Soc. Japan 8, 63 (1990).

Guckel, H.

H. Guckel, K. J. Skrobis, and T. R. Christenson, J. Micromechanics and Microengineering 1, 135 (1991).

Jia, Z.

Z. Jia, L. D. Wang, J. Q. Liang, and J. S. Yao, Chinese Mechanical Engineering 10, 841 (1999).

Liang, J. Q.

Z. Jia, L. D. Wang, J. Q. Liang, and J. S. Yao, Chinese Mechanical Engineering 10, 841 (1999).

J. Q. Liang and J. S. Yao, Proc. SPIE 3874, 20 (1999).

Lu, Q. Y.

Q. Y. Lu and L. F. Che, Chin. J. Scientific Instrument 17, 346 (1996).

Muller, R. S.

L. S. Fan, Y. C. Tai, and R. S. Muller, Sensor Actuators 20, 41 (1989).

Skrobis, K. J.

H. Guckel, K. J. Skrobis, and T. R. Christenson, J. Micromechanics and Microengineering 1, 135 (1991).

Tai, Y. C.

L. S. Fan, Y. C. Tai, and R. S. Muller, Sensor Actuators 20, 41 (1989).

Wang, L. D.

Z. Jia, L. D. Wang, J. Q. Liang, and J. S. Yao, Chinese Mechanical Engineering 10, 841 (1999).

Yao, J. S.

Z. Jia, L. D. Wang, J. Q. Liang, and J. S. Yao, Chinese Mechanical Engineering 10, 841 (1999).

J. Q. Liang and J. S. Yao, Proc. SPIE 3874, 20 (1999).

Chin. J. Scientific Instrument

Q. Y. Lu and L. F. Che, Chin. J. Scientific Instrument 17, 346 (1996).

Chinese Mechanical Engineering

Z. Jia, L. D. Wang, J. Q. Liang, and J. S. Yao, Chinese Mechanical Engineering 10, 841 (1999).

J. Micromechanics and Microengineering

H. Guckel, K. J. Skrobis, and T. R. Christenson, J. Micromechanics and Microengineering 1, 135 (1991).

J. Robotics Soc. Japan

H. Fujita, J. Robotics Soc. Japan 8, 76 (1990).

K. J. Gabriel, J. Robotics Soc. Japan 8, 63 (1990).

Proc. SPIE

J. Q. Liang and J. S. Yao, Proc. SPIE 3874, 20 (1999).

Sensor Actuators

L. S. Fan, Y. C. Tai, and R. S. Muller, Sensor Actuators 20, 41 (1989).

Other

M. Mehregany, P. Nagarkar, S. D. Senturia, and J. H. Lang, in Proceedings of IEEE the 3rd Annual International Workshop on Micro Electro Mechanical Systems, 1 (1990).

B. Wagner, M. Kreutzer, and W. Benecke, in Proceedings of 1992 IEEE Micro Electro Mechanical Systems, 183 (1992).

H. Guckel, T. R. Christenson, K. J. Skrobis, T. S. Jung, J. Klein, K. V. Hartojo, and I. Widjaja, IEEE MEMS Workshop, 7 (1993).

A. M. Flynn, L. S. Tavrow, S. F. Bart, and R. A. Brooks, in Proceedings of 1990 IEEE Ultrasonic Symposium, 1163 (1990).

G. A. Racine, R. Luthier, and N. F. de Rooij, in Proceedings of IEEE MEMS, 128 (1993).

C. H. Ahn, Y. J. Kim, and M. G. Allen, IEEE Mechanical Systems Workshop, 1 (1993).

C. H. Ahn and M. G. Allen, IEEE Solid state Sensor and Actuator Workshop, 14 (1992).

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