Abstract

A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10°at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.

© 2005 Chinese Optics Letters

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References

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1999 (2)

1998 (1)

L. Lin, E. L. Goldstein, and R. W. Tkach, IEEE Photon. Technol. Lett. 10, 525 (1998).

1996 (1)

H. Toshiyoshi and H. Fujita, J. Microelectromechanical Systems 5, 231 (1996).

Fujita, H.

H. Toshiyoshi and H. Fujita, J. Microelectromechanical Systems 5, 231 (1996).

Goldstein, E. L.

L. Lin, E. L. Goldstein, and R. W. Tkach, IEEE Photon. Technol. Lett. 10, 525 (1998).

Huang, L. S.

Kim, C. J.

Lee, S. S.

Lin, L.

L. Lin, E. L. Goldstein, and R. W. Tkach, IEEE Photon. Technol. Lett. 10, 525 (1998).

Marxer, C.

Rooij, N. F. de

Tkach, R. W.

L. Lin, E. L. Goldstein, and R. W. Tkach, IEEE Photon. Technol. Lett. 10, 525 (1998).

Toshiyoshi, H.

H. Toshiyoshi and H. Fujita, J. Microelectromechanical Systems 5, 231 (1996).

Wu, M. C.

IEEE Photon. Technol. Lett. (1)

L. Lin, E. L. Goldstein, and R. W. Tkach, IEEE Photon. Technol. Lett. 10, 525 (1998).

J. Lightwave Technol. (2)

J. Microelectromechanical Systems (1)

H. Toshiyoshi and H. Fujita, J. Microelectromechanical Systems 5, 231 (1996).

Other (1)

Y. Y. Wang, T. I. Kamins, and B. Y. Zhao, Polysilicon Film and its Application at IC (in Chinese) (Science in China Press, Beijing, 1988).

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