Abstract

High performance optical coating requires excellent uniformity of thin-film. Keeping the surface of evaporation material flat is propitious for the stability of vapor plume, and can improve the uniformity of thin-film. Based on the principle of electron beam spot sweep, a pattern controller in domestic coater is designed. For the purpose of even evaporation during auto-sweep, the influence of the depth of material surface in the crucible on the evaporation characteristic is considered. Pre-melting and evaporation experiments are performed on melting material (Ti3O5), subliming material (SiO2), and semi-melting, semi-subliming material (HfO2). The sweeping experimental results show that using the designed sweep controller can make good performance on evaporation and pre-melting for the above materials.

© 2010 Chinese Optics Letters

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