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Optica Publishing Group
  • Chinese Optics Letters
  • Vol. 8,
  • Issue 2,
  • pp. 177-180
  • (2010)

Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

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Abstract

The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.

© 2010 Chinese Optics Letters

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