A number of active elements have been demonstrated using the hybrid silicon evanescent platform, including lasers, amplifiers, and detectors. In this letter, two types of hybrid silicon modulators, fulfilling the building blocks in optical communication on this platform, are presented. A hybrid silicon electroabsorption modulator, suitable for high speed interconnects, with 10-dB extinction ratio at -5 V and 16-GHz modulation bandwidth is demonstrated. In addition, a hybrid silicon Mach-Zehnder modulator utilizing carrier depletion in multiple quantum wells is proved with 2 Vmm voltage-length product, 150-nm optical bandwidth, and a large signal modulation up to 10 Gb/s.
© 2009 Chinese Optics LettersPDF Article