Abstract

We fabricate and measure a multilayer-coated ion-beam-etched laminar grating for the extreme ultraviolet wavelength region. The fabrication process is carefully controlled so that the grating groove and multilayer-coating parameters well meet the design targets. At an incident angle of 10\degree, the peak diffraction efficiency of the +1st order is 20.6% at 14.56 nm and that of the -1st order is 22.1% at 14.65 nm, both close to the theoretical limits.

© 2009 Chinese Optics Letters

High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

Hui Lin, Lichao Zhang, Lifeng Li, Chunshui Jin, Hongjun Zhou, and Tonglin Huo
Opt. Lett. 33(5) 485-487 (2008)

Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5–16.0-nm wavelength region

M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, and W. R. Hunter
Opt. Lett. 22(11) 834-836 (1997)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

Normal-incidence efficiencies of multilayer-coated laminar gratings for the Extreme-Ultraviolet Imaging Spectrometer on the Solar-B mission

John F. Seely, Charles M. Brown, David L. Windt, Soizik Donguy, and Benjawan Kjornrattanawanich
Appl. Opt. 43(7) 1463-1471 (2004)

Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask

Hui Lin and Lifeng Li
Appl. Opt. 47(33) 6212-6218 (2008)