Abstract

This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.

© 2008 Chinese Optics Letters

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References

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  1. J. B. Pendry, Phys. Rev. Lett. 85, 3966 (2000).
  2. N. Fang, H. Lee, C. Sun, and X. Zhang, Science 308, 534 (2005).
  3. R. J. Blaikie, D. O. S. Melville, and M. M. Alkaisi, Microelectron. Eng. 83, 723 (2006).
  4. T. Taubner, D. Korobkin, Y. Urzhumov, G. Shvets, and R. Hillenbrand, Science 313, 1595 (2006).
  5. P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).

2006 (2)

R. J. Blaikie, D. O. S. Melville, and M. M. Alkaisi, Microelectron. Eng. 83, 723 (2006).

T. Taubner, D. Korobkin, Y. Urzhumov, G. Shvets, and R. Hillenbrand, Science 313, 1595 (2006).

2005 (1)

N. Fang, H. Lee, C. Sun, and X. Zhang, Science 308, 534 (2005).

2000 (1)

J. B. Pendry, Phys. Rev. Lett. 85, 3966 (2000).

1972 (1)

P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).

Microelectron. Eng. (1)

R. J. Blaikie, D. O. S. Melville, and M. M. Alkaisi, Microelectron. Eng. 83, 723 (2006).

Phys. Rev. B (1)

P. B. Johnson and R. W. Christy, Phys. Rev. B 6, 4370 (1972).

Phys. Rev. Lett. (1)

J. B. Pendry, Phys. Rev. Lett. 85, 3966 (2000).

Science (2)

N. Fang, H. Lee, C. Sun, and X. Zhang, Science 308, 534 (2005).

T. Taubner, D. Korobkin, Y. Urzhumov, G. Shvets, and R. Hillenbrand, Science 313, 1595 (2006).

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