Abstract

The influence of water vapor content in high vacuum chamber during the coating process on physical properties of HfO2 films was investigated. Coatings were deposited on BK7 substrates by electron beam evaporation and photoelectric maximum control method. An in situ residual gas analyzer (RGA) was used to monitor the residual gas composition in the vacuum chamber. The optical properties, microstructure, absorption and laser-induced damage threshold (LIDT) of the samples were characterized by Lambda 900 spectrophotometer, X-ray diffraction (XRD), surface thermal lensing (STL) technique and 1064-nm Q-switched pulsed laser at a pulse duration of 12 ns respectively. It was found that a cold trap is an effective equipment to suppress water vapor in the vacuum chamber during the pumping process, and the coatings deposited in the vacuum atmosphere with relatively low water vapor composition show higher refractive index and smaller grain size. Meanwhile, the higher LIDT value is corresponding to lower absorbance.

© 2007 Chinese Optics Letters

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  1. R. J. Tench, R. Chow, and M. R. Kozlowski, Proc. SPIE 2114, 415 (1994).
  2. M. R. Kozlowski and R. Chow, Proc. SPIE 2114, 640 (1994).
  3. D. W. Reicher, K. C. Jungling, and C. K. Carniglia, Proc. SPIE 2114, 154 (1994).
  4. K. H. Guenther, Appl. Opt. 23, 3806 (1984).
  5. T. A. Germer and C. C. Asmail, J. Opt. Soc. Am. A 16, 1326 (1999).
  6. R. Chow, S. Falabella, G. E. Loomis, F. Rainer, C. J. Stolz, and M. R. Kozlowski, Appl. Opt. 32, 5567 (1993).
  7. S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).
  8. J. Shao and Z. Fan, Opt. Precision Eng. (in Chinese) 13, 471 (2005).
  9. Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).
  10. Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).
  11. H. Hu, Z. Fan, and F. Luo, Appl. Opt. 40, 1950 (2001).
  12. ISO 11254-1: Lasers and laser-related equipment -- determination of laser-induced damage threshold of optical surfaces. Part 1. 1-on-1 test (2000).

2005

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

J. Shao and Z. Fan, Opt. Precision Eng. (in Chinese) 13, 471 (2005).

2003

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

2001

1999

1996

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

1994

R. J. Tench, R. Chow, and M. R. Kozlowski, Proc. SPIE 2114, 415 (1994).

M. R. Kozlowski and R. Chow, Proc. SPIE 2114, 640 (1994).

D. W. Reicher, K. C. Jungling, and C. K. Carniglia, Proc. SPIE 2114, 154 (1994).

1993

1984

Asmail, C. C.

Aumer, M. E.

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Carniglia, C. K.

D. W. Reicher, K. C. Jungling, and C. K. Carniglia, Proc. SPIE 2114, 154 (1994).

Cho, S.

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Chow, R.

R. J. Tench, R. Chow, and M. R. Kozlowski, Proc. SPIE 2114, 415 (1994).

M. R. Kozlowski and R. Chow, Proc. SPIE 2114, 640 (1994).

R. Chow, S. Falabella, G. E. Loomis, F. Rainer, C. J. Stolz, and M. R. Kozlowski, Appl. Opt. 32, 5567 (1993).

Falabella, S.

Fan, Z.

J. Shao and Z. Fan, Opt. Precision Eng. (in Chinese) 13, 471 (2005).

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

H. Hu, Z. Fan, and F. Luo, Appl. Opt. 40, 1950 (2001).

Germer, T. A.

Gong, H.

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

Gu, S.

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

Guenther, K. H.

Hu, H.

Janiak, D. S.

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Jungling, K. C.

D. W. Reicher, K. C. Jungling, and C. K. Carniglia, Proc. SPIE 2114, 154 (1994).

Kozlowski, M. R.

M. R. Kozlowski and R. Chow, Proc. SPIE 2114, 640 (1994).

R. J. Tench, R. Chow, and M. R. Kozlowski, Proc. SPIE 2114, 415 (1994).

R. Chow, S. Falabella, G. E. Loomis, F. Rainer, C. J. Stolz, and M. R. Kozlowski, Appl. Opt. 32, 5567 (1993).

Krupka, R.

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

Kuo, P.

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

Loomis, G. E.

Lu, Y.

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

Luo, F.

Partlow, D. P.

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Rainer, F.

Reicher, D. W.

D. W. Reicher, K. C. Jungling, and C. K. Carniglia, Proc. SPIE 2114, 154 (1994).

Rubloff, G. W.

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Shao, J.

J. Shao and Z. Fan, Opt. Precision Eng. (in Chinese) 13, 471 (2005).

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

Stolz, C. J.

Tench, R. J.

R. J. Tench, R. Chow, and M. R. Kozlowski, Proc. SPIE 2114, 415 (1994).

Thomson, D. B.

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Wang, Y.

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

Wu, Z.

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

Zhao, Y.

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

Appl. Opt.

Appl. Surf. Sci.

Y. Zhao, Y. Wang, H. Gong, J. Shao, and Z. Fan, Appl. Surf. Sci. 210, 353 (2003).

J. Opt. Soc. Am. A

J. Vac. Sci. Technol. B

S. Cho, D. S. Janiak, G. W. Rubloff, M. E. Aumer, D. B. Thomson, and D. P. Partlow, J. Vac. Sci. Technol. B 23, 2007 (2005).

Opt. Precision Eng. (in Chinese)

J. Shao and Z. Fan, Opt. Precision Eng. (in Chinese) 13, 471 (2005).

Proc. SPIE

R. J. Tench, R. Chow, and M. R. Kozlowski, Proc. SPIE 2114, 415 (1994).

M. R. Kozlowski and R. Chow, Proc. SPIE 2114, 640 (1994).

D. W. Reicher, K. C. Jungling, and C. K. Carniglia, Proc. SPIE 2114, 154 (1994).

Thin Solid Films

Z. Wu, P. Kuo, Y. Lu, S. Gu, and R. Krupka, Thin Solid Films 290-291, 271 (1996).

Other

ISO 11254-1: Lasers and laser-related equipment -- determination of laser-induced damage threshold of optical surfaces. Part 1. 1-on-1 test (2000).

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