Abstract

This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.

© 2005 Chinese Optics Letters

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  1. A. Asundi, M. T. Cheung, and C. S. Lee, Experimental Mechanics 29, 258 (1989).
  2. Y. Wang and F. P. Chiang, Opt. Eng. 33, 2654 (1994).
  3. J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).
  4. F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).
  5. S.-T. Lin, Opt. Eng. 40, 822 (2001).

2002 (1)

F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).

2001 (1)

S.-T. Lin, Opt. Eng. 40, 822 (2001).

1997 (1)

J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).

1994 (1)

Y. Wang and F. P. Chiang, Opt. Eng. 33, 2654 (1994).

1989 (1)

A. Asundi, M. T. Cheung, and C. S. Lee, Experimental Mechanics 29, 258 (1989).

Ashley, P. R.

J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).

Asundi, A.

A. Asundi, M. T. Cheung, and C. S. Lee, Experimental Mechanics 29, 258 (1989).

Cheung, M. T.

A. Asundi, M. T. Cheung, and C. S. Lee, Experimental Mechanics 29, 258 (1989).

Chiang, F. P.

Y. Wang and F. P. Chiang, Opt. Eng. 33, 2654 (1994).

Cole, H. J.

J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).

Dai, F. L.

F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).

Gilbert, J. A.

J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).

Lee, C. S.

A. Asundi, M. T. Cheung, and C. S. Lee, Experimental Mechanics 29, 258 (1989).

Li, C.

F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).

Lin, S.-T.

S.-T. Lin, Opt. Eng. 40, 822 (2001).

Shang, H. X.

F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).

Shepherd, R. L.

J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).

Wang, Y.

Y. Wang and F. P. Chiang, Opt. Eng. 33, 2654 (1994).

Xie, H. M.

F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).

Experimental Mechanics (1)

A. Asundi, M. T. Cheung, and C. S. Lee, Experimental Mechanics 29, 258 (1989).

Opt. Eng. (3)

Y. Wang and F. P. Chiang, Opt. Eng. 33, 2654 (1994).

J. A. Gilbert, R. L. Shepherd, H. J. Cole, and P. R. Ashley, Opt. Eng. 36, 3336 (1997).

S.-T. Lin, Opt. Eng. 40, 822 (2001).

Proc. SPIE (1)

F. L. Dai, H. X. Shang, C. Li, and H. M. Xie, Proc. SPIE 5058, 393 (2002).

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