Abstract
Near-field holography (NFH), with its virtues of precise critical
dimensions and high throughput, has a great potential for the realization
of soft x-ray diffraction gratings. We show that NFH with reflections
reduced by the integration of antireflective coatings (ARCs) simplifies
the NFH process relative to that of setups using refractive index liquids.
Based on the proposed NFH with ARCs, gold-coated laminar gratings were
fabricated using NFH and subsequent ion beam etching. The efficiency
angular spectrum shows that the stray light of the gratings is reduced one
level of magnitude by the suppression of interface reflections during
NFH.
© 2016 Chinese Laser Press
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