Abstract

A convex aspheric surface using a computer-generated hologram (CGH) test plate fabricated with novel techniques and equipment is tested. However, the measurement result is not verified via comparison with other methods. To verify the accuracy of the measurement, a perfect sphere surface is measured by the following. The measurement result is quantified into four parts: the figure error from the tested spherical surface; the figure error from the reference spherical surface; the error from the hologram; and the adjustment error from misalignment. The measurement result, removed from the later three errors, shows agreement to 4-nm RMS with the test by Zygo interfermeter of the same surface. Analysis of the CGH test showed the overall accuracy of the 4-nm RMS, with 3.9 nm from the test plate figure, 0.5 nm from the hologram, and 0.74 nm from other sources, such as random vibration, various second order effects, and so on. Thus, the measurement accuracy using the proposed CGH could be very high. CGH can therefore be used to measure aspheric surfaces accurately.

© 2012 Chinese Optics Letters

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2009 (1)

2005 (1)

H. Liu, Z. Lu, and F. Li, Opt. Laser Technol. 37, 642 (2005).

2004 (3)

2003 (2)

2002 (1)

2000 (1)

Z. Lu and Z. Weng, Proc. SPIE 4093, 176 (2000).

1999 (1)

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

1995 (1)

J. H. Burge, Proc. SPIE 2576, 258 (1995).

1994 (1)

J. H. Burge and D. S. Anderson, Proc. SPIE 2199, 181 (1994).

1990 (1)

M. V. Mantravadi, V. Kumar, and R. J. von Handorf, Proc. SPIE 1332, 107 (1990).

Anderson, D. S.

J. H. Burge and D. S. Anderson, Proc. SPIE 2199, 181 (1994).

Burge, J. H.

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

J. H. Burge, Proc. SPIE 2576, 258 (1995).

J. H. Burge and D. S. Anderson, Proc. SPIE 2199, 181 (1994).

Chang, Y.

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

Chen, L.

Gao, Z.

Handorf, R. J. von

M. V. Mantravadi, V. Kumar, and R. J. von Handorf, Proc. SPIE 1332, 107 (1990).

He, Y.

Huang, L.

Kan, S.

Kumar, V.

M. V. Mantravadi, V. Kumar, and R. J. von Handorf, Proc. SPIE 1332, 107 (1990).

Li, F.

Li, J.

Liu, H.

H. Liu, Z. Lu, and F. Li, Opt. Laser Technol. 37, 642 (2005).

H. Liu, Z. Lu, F. Li, Y. Xie, S. Kan, and S. Wang, Opt. Express 12, 3251 (2004).

H. Liu, Z. Lu, F. Li, and Y. Xie, Opt. Commun. 242, 339 (2004).

Lu, Z.

Ma, J.

Mantravadi, M. V.

M. V. Mantravadi, V. Kumar, and R. J. von Handorf, Proc. SPIE 1332, 107 (1990).

Pun, E.

Wang, S.

Weng, Z.

Wong, W.

Xie, C.

Xie, Y.

Zhao, J.

Zhu, R.

Chin. Opt. Lett. (1)

Opt. Commun. (1)

H. Liu, Z. Lu, F. Li, and Y. Xie, Opt. Commun. 242, 339 (2004).

Opt. Express (5)

Opt. Laser Technol. (1)

H. Liu, Z. Lu, and F. Li, Opt. Laser Technol. 37, 642 (2005).

Proc. SPIE (5)

Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).

M. V. Mantravadi, V. Kumar, and R. J. von Handorf, Proc. SPIE 1332, 107 (1990).

J. H. Burge, Proc. SPIE 2576, 258 (1995).

J. H. Burge and D. S. Anderson, Proc. SPIE 2199, 181 (1994).

Z. Lu and Z. Weng, Proc. SPIE 4093, 176 (2000).

Other (1)

A. Offner and D. Malacara, Optical Shop Testing (Wiley, New York, 2007).

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