Abstract
Displacement sensor based on the polarization mixture and the cavity tuning
of the orthogonal polarized He-Ne laser 1.15 μm is presented. The power tuning
curves of He-Ne laser are irregular, and it is difficult to measure the change in
cavity length. The distortion of the curves is caused by the higher relative
excitation compared with the He-Ne laser at 633 nm. In view of its potential for the
wider displacement measuring range, a new method of displacement sensing is
developed. Experiments show that displacement measuring stability based on the
method of the polarization mixture is better than that of the power tuning curves.
The displacement sensor achieves the measuring range of 100 mm, resolution of 144
nm, and linearity of 7 × 10<sup>-6</sup>.
© 2012 Chinese Optics Letters
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