Abstract

To improve the optical storage performance, Sn was doped into Ge_(2)Sb_(2)Te_(5) phase change thin films. The optical and thermal properties of Sn-doped Ge_(2)Sb_(2)Te_(5) film were investigated. The crystal structures of the as-sputtered and the annealed films were identified by the X-ray diffraction (XRD) method. The differential scanning calorimeter (DSC) method is used to get the crystallization temperature and crystallization energy (Ea). It was found that proper Sn-doping could highly improve storage performance of the Ge_(2)Sb_(2)Te_(5) media.

© 2005 Chinese Optics Letters

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  1. T. H. Jeong, M. R. Kim, and H. Seo, J. Appl. Phys. 8979, 774 (1999).
  2. M. R. Kim, H. Seo, and T. H. Jung, Proc. SPIE 3401, 259 (1998).
  3. C.-M. Lee, T.-S. Chin, and Y.-Y. Huang, Jpn. J. Appl. Phys 39, 6369 (2000).
  4. F. X. Gan, L. S. Hou, and G. B. Wang, Mat. Sci. and Eng. B 76, 63 (2000).
  5. F. S. Jiang and M. Okuda, Jpn. J. Appl. Phys. 30, 97 (1991).
  6. H. F. Hu, F. Y. Lin, and Y. B. Yuan, J. Non-Cryst. Solids 112, 306 (1989).
  7. H. Yinnon and D. R. Uhlmann, J. Non-Cryst. Solids 54, 253 (1983).

2000 (2)

C.-M. Lee, T.-S. Chin, and Y.-Y. Huang, Jpn. J. Appl. Phys 39, 6369 (2000).

F. X. Gan, L. S. Hou, and G. B. Wang, Mat. Sci. and Eng. B 76, 63 (2000).

1999 (1)

T. H. Jeong, M. R. Kim, and H. Seo, J. Appl. Phys. 8979, 774 (1999).

1998 (1)

M. R. Kim, H. Seo, and T. H. Jung, Proc. SPIE 3401, 259 (1998).

1991 (1)

F. S. Jiang and M. Okuda, Jpn. J. Appl. Phys. 30, 97 (1991).

1989 (1)

H. F. Hu, F. Y. Lin, and Y. B. Yuan, J. Non-Cryst. Solids 112, 306 (1989).

1983 (1)

H. Yinnon and D. R. Uhlmann, J. Non-Cryst. Solids 54, 253 (1983).

Chin, T.-S.

C.-M. Lee, T.-S. Chin, and Y.-Y. Huang, Jpn. J. Appl. Phys 39, 6369 (2000).

Gan, F. X.

F. X. Gan, L. S. Hou, and G. B. Wang, Mat. Sci. and Eng. B 76, 63 (2000).

Hou, L. S.

F. X. Gan, L. S. Hou, and G. B. Wang, Mat. Sci. and Eng. B 76, 63 (2000).

Hu, H. F.

H. F. Hu, F. Y. Lin, and Y. B. Yuan, J. Non-Cryst. Solids 112, 306 (1989).

Huang, Y.-Y.

C.-M. Lee, T.-S. Chin, and Y.-Y. Huang, Jpn. J. Appl. Phys 39, 6369 (2000).

Jeong, T. H.

T. H. Jeong, M. R. Kim, and H. Seo, J. Appl. Phys. 8979, 774 (1999).

Jiang, F. S.

F. S. Jiang and M. Okuda, Jpn. J. Appl. Phys. 30, 97 (1991).

Jung, T. H.

M. R. Kim, H. Seo, and T. H. Jung, Proc. SPIE 3401, 259 (1998).

Kim, M. R.

T. H. Jeong, M. R. Kim, and H. Seo, J. Appl. Phys. 8979, 774 (1999).

M. R. Kim, H. Seo, and T. H. Jung, Proc. SPIE 3401, 259 (1998).

Lee, C.-M.

C.-M. Lee, T.-S. Chin, and Y.-Y. Huang, Jpn. J. Appl. Phys 39, 6369 (2000).

Lin, F. Y.

H. F. Hu, F. Y. Lin, and Y. B. Yuan, J. Non-Cryst. Solids 112, 306 (1989).

Okuda, M.

F. S. Jiang and M. Okuda, Jpn. J. Appl. Phys. 30, 97 (1991).

Seo, H.

T. H. Jeong, M. R. Kim, and H. Seo, J. Appl. Phys. 8979, 774 (1999).

M. R. Kim, H. Seo, and T. H. Jung, Proc. SPIE 3401, 259 (1998).

Uhlmann, D. R.

H. Yinnon and D. R. Uhlmann, J. Non-Cryst. Solids 54, 253 (1983).

Wang, G. B.

F. X. Gan, L. S. Hou, and G. B. Wang, Mat. Sci. and Eng. B 76, 63 (2000).

Yinnon, H.

H. Yinnon and D. R. Uhlmann, J. Non-Cryst. Solids 54, 253 (1983).

Yuan, Y. B.

H. F. Hu, F. Y. Lin, and Y. B. Yuan, J. Non-Cryst. Solids 112, 306 (1989).

J. Appl. Phys. (1)

T. H. Jeong, M. R. Kim, and H. Seo, J. Appl. Phys. 8979, 774 (1999).

J. Non-Cryst. Solids (2)

H. F. Hu, F. Y. Lin, and Y. B. Yuan, J. Non-Cryst. Solids 112, 306 (1989).

H. Yinnon and D. R. Uhlmann, J. Non-Cryst. Solids 54, 253 (1983).

Jpn. J. Appl. Phys (1)

C.-M. Lee, T.-S. Chin, and Y.-Y. Huang, Jpn. J. Appl. Phys 39, 6369 (2000).

Jpn. J. Appl. Phys. (1)

F. S. Jiang and M. Okuda, Jpn. J. Appl. Phys. 30, 97 (1991).

Mat. Sci. and Eng. B (1)

F. X. Gan, L. S. Hou, and G. B. Wang, Mat. Sci. and Eng. B 76, 63 (2000).

Proc. SPIE (1)

M. R. Kim, H. Seo, and T. H. Jung, Proc. SPIE 3401, 259 (1998).

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