We demonstrate the quantitative capabilities of Raman confocal microscopy as a nondestructive method to measure the partial pressure of molecular gases in mm3 range sealed volume having an optical access. Thanks to a calibration procedure, we apply this technique for the characterization of the absolute nitrogen partial pressure inside buffered micro electromechanical system (MEMS) atomic vapor cells developed for atomic clocks. Our results are compared with measurements obtained by rubidium hyperfine frequency spectroscopy and a good agreement is demonstrated between the two methods, with a three-sigma detection limit below 10 mbar for a 1 h integration time, using a 33 mW 532 nm excitation laser. These results prove the potential of confocal micro-Raman spectroscopy as a simple and nondestructive method for small-scale pressure measurements.
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