The control of the angle of incidence in attenuated total reflection (ATR) Fourier transform infrared (FT-IR) spectroscopy allows for the probing of the sample at different depths of penetration of the evanescent wave. This approach has been recently coupled with macro-imaging capability using a diamond ATR accessory. In this paper, the design of optical apertures for the micro-germanium (Ge) ATR objective is presented for an FT-IR spectroscopic imaging microscope, allowing measurements with different angles of incidence. This approach provides the possibility of three-dimensional (3D) profiling in micro-ATR FT-IR imaging mode. The proof of principle results for measurements of polymer laminate samples at different angles of incidence confirm that controlling the depth of penetration is possible using a Ge ATR objective with added apertures.
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