Physical evaporation of SiO and SiO<sub>2</sub> under ultra-high vacuum conditions was monitored <i>in situ</i> with infrared spectroscopy at frequencies between 450 cm<sup>−1</sup> and 5000 cm<sup>−1</sup>. The measured vibrational spectra of the condensed films are identical in both cases, for SiO and SiO<sub>2</sub> evaporation, and can be described with four Brendel oscillators located at 380 cm<sup>−1</sup>, 713 cm<sup>−1</sup>, 982 cm<sup>−1</sup>, and 1101 cm<sup>−1</sup>, corresponding to typical vibration modes in SiO.

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