Pulsed terahertz attenuated total reflection (ATR) spectra of solid materials and liquids covering the 10 cm<sup>−1</sup> to 120 cm<sup>−1</sup> (0.3 THz to 3.6 THz) region of the electromagnetic spectrum are recorded using a terahertz pulsed spectrometer and silicon ATR modules. Pulsed terahertz ATR measurements are completed nondestructively using small amounts of sample (typically 1 mg for solids) and no sample preparation. Many terahertz analyses can be run in rapid sequence, minimizing the analysis time.

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