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Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 56,
  • Issue 3,
  • pp. 381-385
  • (2002)

Effect of Ar and O2 Atmospheres on the Fundamental Properties of the Plasma Produced by Laser Ablation of Lithium Niobate

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Abstract

The influence of gas atmospheres (at 1 torr) of different natures, both reactive (O<sub>2</sub>) and inert (Ar), on the spatial evolution of the electron temperature (<i>T</i><sub>e</sub>) and electron density (<i>N</i><sub>e</sub>) of the plasma generated by laser ablation of a LiNbO<sub>3</sub> target is evaluated by optical emission spectroscopy techniques. It is found that the behavior of <i>N</i><sub>e</sub> in the plasma produced in vacuum, argon, and oxygen atmospheres exhibit quite different trends as a function of the distance from the target to the substrate, but the behavior of <i>T</i><sub>e</sub> is nearly constant. The spatial constancy of <i>T</i><sub>e</sub> in all the atmospheres studied is probably related not only to the low laser irradiance used (0.06 GW cm<sup>-2</sup>), but also to a possible collisional decoupling of the heavy species in the central part of the expanding plasma plume where a low pressure region is formed. The fact that <i>N</i><sub>e</sub> is lower in Ar than in O<sub>2</sub> indicates the presence of fewer positive ions in the plasma generated in Ar. The impact of this result on the better crystallinity observed in the LiNbO<sub>3</sub> films grown in Ar is also discussed.

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