Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Applied Spectroscopy
  • Vol. 52,
  • Issue 3,
  • pp. 444-448
  • (1998)

Depth Profiling of Phosphorus in Photonic-Grade Silicon Using Laser-Induced Breakdown Spectrometry

Not Accessible

Your library or personal account may give you access

Abstract

Laser-induced breakdown spectrometry (LIBS) has been evaluated for depth profiling of phosphorus doping in silicon. Laser plasmas were formed by focusing a Nd:YAG laser (operating in the second harmonic, 532 nm) on the sample surface. Plasma emission was collected, dispersed, and detected with the use of a charge-coupled device (CCD). Experimental parameters, such as delay time and sample position relative to the laser focal point, were optimized to improve the signal-to-background ratio of phosphorus line emission. Diffusion profiles by LIBS of samples with different phosphorus diffusion steps are shown. Crater depth per pulse and ablated mass per pulse were measured to be 1.2 mu m pulse-1 and 50 ng pulse-1, respectively. The knowledge of depth per pulse permitted the estimation of thickness of the P diffusion layer.

PDF Article
More Like This
Depth profiling analysis of CuIn1-xGaxSe2 absorber layer by laser induced breakdown spectroscopy in atmospheric conditions

Chan Kyu Kim, Seok Hee Lee, Jung Hwan In, Hak Jae Lee, and Sungho Jeong
Opt. Express 21(S6) A1018-A1027 (2013)

Multielemental analysis of prehistoric animal teeth by laser-induced breakdown spectroscopy and laser ablation inductively coupled plasma mass spectrometry

Michaela Galiová, Jozef Kaiser, Francisco J. Fortes, Karel Novotný, Radomír Malina, Lubomír Prokeš, Aleš Hrdlička, Tomáš Vaculovič, Miriam Nývltová Fišáková, Jiří Svoboda, Viktor Kanický, and Javier J. Laserna
Appl. Opt. 49(13) C191-C199 (2010)

Detection of trace phosphorus in steel using laser-induced breakdown spectroscopy combined with laser-induced fluorescence

X. K. Shen, H. Wang, Z. Q. Xie, Y. Gao, H. Ling, and Y. F. Lu
Appl. Opt. 48(13) 2551-2558 (2009)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved