Improvements to the microcavity hollow cathode source are reported. These include a lower breakdown voltage and a larger operating range of fill-gas pressures of argon, helium, and mixtures of each. Data showing the effect of size, shape, and materials (copper and stainless steel) of the cathodes and anodes on the breakdown voltage are presented. The minimum discharge current required for the discharge to enter the cathode cavity is profoundly affected by the size of the cathode cavity.

PDF Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription