The effect of the erroneous functional forms of the slit functions on the best-fit temperature in CARS (coherent anti-Stokes Raman spectroscopy) thermometry has been investigated. When the shape of the slit function is described as a Lorentzian or a Gaussian function and its width adjusted with the room-temperature CARS spectrum, the maximum systematic errors due to the slit functions reach 1.5-2.5% in the temperature range from 300 to 2100 K. A fast-fitting algorithm exponentially interpolating the CARS spectrum at an intermediate temperature with two precalculated spectra has been proposed, and its validity has been assessed by calculating the error due to the fitting algorithm.

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