Laser spark emission spectroscopy is used to determine the elemental composition of contaminants found on electronic microcircuits fabricated on alumina substrates. This technique is particularly useful for rapid analyses of dielectric surfaces, and spatially resolved data with some degree of depth profiling information are obtained. Two specific examples are given which illustrate the utility of the method in pinpointing production problems.

PDF Article

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.