Abstract

The output of a Questek Model 2210 excimer laser, operated with XeCl fill, is characterized in both the time and frequency domains. Power spectra are obtained through use of the fast Fourier transform which show that the output is essentially white in character. Furthermore, noise power diminishes with repetition rate, reaching a broad minimum around 40 Hz. Analysis in the time domain shows a "roughly Gaussian" distribution. Movement of optically opaque ("thick") particles in the path of the laser beam is shown to increase the variance of the noise, but not its low-frequency content.

Temporal variations in the spectral output of a xenon fluoride excimer laser

John Burris and Willam Heaps
Appl. Opt. 34(3) 426-427 (1995)

Output coupler design of unstable cavities for excimer lasers

C. Giuri, M. R. Perrone, and V. Piccinno
Appl. Opt. 36(6) 1143-1148 (1997)

Spectral characteristics of laser cavities employing multipass grating interferometers as output couplers

G. Giuliani, E. Palange, and G. Salvetti
J. Opt. Soc. Am. B 4(11) 1781-1789 (1987)

Temporal characteristics of the light output from optical fibers with PRBS-modulated laser injection

Xuan He and Weiwei Ke
Opt. Express 30(22) 39269-39282 (2022)

Excimer laser model based on a temporal convolutional neural network

Zexu Sun, Xiaoquan Han, Xiaobin Wu, and Zebin Feng
Appl. Opt. 61(2) 362-368 (2022)